Sensors: Two Types of Suspended-Silicon-Nanowire Based Sensors of Ultra-high Sensitivity

传感器：两种超高灵敏度悬浮硅纳米线传感器

• 批准号: 0822609
• 负责人: Cheng Luo
• 金额: $ 10.07万
• 依托单位: University of Texas at Arlington
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2007
• 资助国家: 美国
• 起止时间: 2007-09-01 至 2009-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0822609&HistoricalAwards=false
• 关键词: Sensors; Two; Types; Suspended; Silicon

0529104LUOThis project will systematically explore a thinning and trimming approach to the production of silicon nanowires (SiNW) from silicon microwires using a combination of theoretical, numerical and experimental investigations. The thinning and trimming approach will be used to generate SiNWs of diameters down to 20nm. Subsequently, two types of new suspended-SiNW-based sensors of ultra-high sensitivity will be developed to detect nontoxic and toxic targets of interest, respectively. One-dimensional nanostructures have attracted great attention recently because of their potential applications as excellent components in micro/nanodevices. SiNWs in particular have received much attention since silicon is the most widely used material in integrated-circuit and microfabrication processes and has unique mechanical and electrical properties. However, due to the shortcomings of the existing fabrication approaches, new methods are needed to produce SiNWs that cannot only be massively fabricated but also batch integrated to functional devices. The proposed thinning and trimming approach is believed to be such a method, and would permit precise control of the structure, size and positions of SiNWs. Furthermore, this method may be used to break through the limitation of lithography in the sense that silicon features fabricated by any lithographic methods can be further miniaturized using the approach. Compared with microbeam-based sensors, the two types of sensors are expected to be several orders higher in sensitivity. The project will contribute to nanotechnology education through new teaching modules and presentations for undergraduate and graduate students, and the animation of nanotechnology concepts on a website for K-12 students and teachers.

0529104Luothis项目将系统地探索一种使用理论，数值和实验性研究的组合，从硅微线生产硅纳米线（SINW）。稀疏和修剪方法将用于产生直径降低到20nm的罪行。随后，将开发两种类型的新型基于悬浮的基于SINW的超高灵敏度传感器，以分别检测无毒和有毒目标。一维纳米结构最近引起了人们的极大关注，因为它们的潜在应用是微/纳米版本中的出色组成部分。特别是SINW受到了很多关注，因为硅是整合电路和微加工过程中使用最广泛的材料，并且具有独特的机械和电性能。但是，由于现有制造方法的缺点，需要新的方法来产生不仅可以大规模制造的，而且还集成到功能设备的批处理。提出的稀疏和修剪方法被认为是一种方法，可以精确控制SINW的结构，大小和位置。此外，这种方法可用于打破光刻的局限性，从某种意义上说，通过任何光刻方法制造的硅特征可以使用该方法进一步微型化。与基于微聚光的传感器相比，两种类型的传感器的灵敏度较高。该项目将通过针对本科生和研究生的新教学模块和演讲为纳米技术教育做出贡献，以及在K-12学生和老师的网站上纳米技术概念的动画。