NER: An Innovative Intermediate-Layer Lithography Approach For Patterning Conducting Polymers

NER：用于图案化导电聚合物的创新中间层光刻方法

• 批准号: 0508454
• 负责人: Cheng Luo
• 金额: $ 8.28万
• 依托单位: Louisiana Tech University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2005
• 资助国家: 美国
• 起止时间: 2005-07-01 至 2007-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0508454&HistoricalAwards=false
• 关键词: NER; Innovative; Intermediate; Layer; Lithography

This proposal was received in response to Nanoscale Science and Engineering initiative, NSF 04-043, category Nanoscale Exploratory Research (NER). The objective of this NER research is to demonstrate the feasibility of generating conducting polymer wires down to 30nm. The approach is to first coat a non-conducting polymer intermediate layer between a substrate and a conducting polymer film and then pattern the conducting polymer layer through a mold insertion. The discovery of high conductivity in doped polyacetylene in 1971 (garnering the 2000 Nobel Prize in Chemistry for the three discovering scientists) has attracted considerable interest in the application of polymers as the semiconducting and conducting materials due to their promising potential to replace silicon and metals in building devices. However, existing techniques present significant technical challenges in producing conducting polymer microstructures, in particular, nanostructures. It is believed that this research will solve these challenges and suggest a dramatic change in the way that polymer devices and systems are created. Education and research, at both graduate and undergraduate levels, are deeply and mutually interdependent. This project will incorporate two new teaching modules into two courses that the principal investigator is teaching, "BioMEMS" and "Microfabrication Applications and Device Fabrication." In addition to international micro/nano manufacturing communities, this project will disseminate the information to Grambling State University (a neighboring minority-serving university) via two presentations and to K-12 schoolteachers and students through a so-call "potato action" (i.e., use the video clips to help visualize nanotechnology materials on a web site that will be established for this purpose).

该提案是响应纳米尺度科学与工程计划，NSF 04-043，纳米尺度探索性研究（NER）类别收到的。这项NER研究的目的是证明生产低至30nm的导电聚合物导线的可行性。该方法是首先在基板和导电聚合物薄膜之间涂覆非导电聚合物中间层，然后通过模具插入对导电聚合物层进行定形。1971年掺杂聚乙炔的高导电性的发现（三位发现的科学家获得了2000年诺贝尔化学奖）引起了人们对聚合物作为半导体和导电材料的应用的极大兴趣，因为它们在建筑设备中有取代硅和金属的潜力。然而，现有的技术在生产导电聚合物微结构，特别是纳米结构方面存在着重大的技术挑战。人们相信，这项研究将解决这些挑战，并为聚合物器件和系统的制造方式带来巨大变化。无论是研究生阶段还是本科阶段，教育和研究都是相互依存的。该项目将把两个新的教学模块纳入首席研究员教授的两门课程，“生物医学系统”和“微制造应用和设备制造”。除了国际微/纳米制造社区外，该项目还将通过两次演讲向格兰布林州立大学（一所邻近的少数民族大学）传播信息，并通过所谓的“土豆行动”向K-12学校的教师和学生传播信息（即，使用视频剪辑帮助将纳米技术材料可视化地放在为此目的而建立的网站上）。