NER: An Innovative Intermediate-Layer Lithography Approach For Patterning Conducting Polymers

NER：用于图案化导电聚合物的创新中间层光刻方法

• 批准号: 0508454
• 负责人: Cheng Luo
• 金额: $ 8.28万
• 依托单位: Louisiana Tech University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2005
• 资助国家: 美国
• 起止时间: 2005-07-01 至 2007-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0508454&HistoricalAwards=false
• 关键词: NER; Innovative; Intermediate; Layer; Lithography

This proposal was received in response to Nanoscale Science and Engineering initiative, NSF 04-043, category Nanoscale Exploratory Research (NER). The objective of this NER research is to demonstrate the feasibility of generating conducting polymer wires down to 30nm. The approach is to first coat a non-conducting polymer intermediate layer between a substrate and a conducting polymer film and then pattern the conducting polymer layer through a mold insertion. The discovery of high conductivity in doped polyacetylene in 1971 (garnering the 2000 Nobel Prize in Chemistry for the three discovering scientists) has attracted considerable interest in the application of polymers as the semiconducting and conducting materials due to their promising potential to replace silicon and metals in building devices. However, existing techniques present significant technical challenges in producing conducting polymer microstructures, in particular, nanostructures. It is believed that this research will solve these challenges and suggest a dramatic change in the way that polymer devices and systems are created. Education and research, at both graduate and undergraduate levels, are deeply and mutually interdependent. This project will incorporate two new teaching modules into two courses that the principal investigator is teaching, "BioMEMS" and "Microfabrication Applications and Device Fabrication." In addition to international micro/nano manufacturing communities, this project will disseminate the information to Grambling State University (a neighboring minority-serving university) via two presentations and to K-12 schoolteachers and students through a so-call "potato action" (i.e., use the video clips to help visualize nanotechnology materials on a web site that will be established for this purpose).

该提案是为了回应纳米级科学与工程倡议，NSF 04-043，纳米级探索性研究类别（NER）。 这项NER研究的目的是证明将导电电线降低到30nm的可行性。该方法是首先将底物和导电聚合物膜之间的非导电聚合物中间层涂覆，然后通过模具插入对导电聚合物层进行模板。 1971年，在掺杂的聚乙炔中发现高电导率（获得了2000年诺贝尔化学奖，这三个发现科学家奖）引起了人们对聚合物的应用的极大兴趣，因为它们由于其在建筑设备中替代硅和金属的有希望的潜力，因此由于其有希望的潜力而成为半导体和导电材料。 但是，现有技术在产生传导聚合物微观结构（尤其是纳米结构）方面面临着重大的技术挑战。 人们认为，这项研究将解决这些挑战，并提出创建聚合物设备和系统的方式发生巨大变化。 在研究生和本科阶段的教育和研究都是深层和相互依存的。 该项目将将两个新的教学模块纳入主要研究者教学的两个课程：“生物元”和“微加工应用和设备制造”。 除国际微/纳米制造社区外，该项目还将通过两个演讲将信息传播给Grambling州立大学（邻近的少数派服务大学），并通过所谓的“马铃薯动作”（即，使用视频剪辑来帮助可视化纳米技术材料的纳米技术材料），并通过所谓的“马铃薯动作”将信息传播给了K-12学校教师和学生。