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Synthesis and analysis of pure and metal-containing carbon coatings using HPPMS-PVD

使用 HPPMS-PVD 合成和分析纯碳涂层和含金属碳涂层

基本信息

批准号：
235011713
负责人：
Professorin Dr.-Ing. Kirsten Bobzin
金额：
--
依托单位：
Institut für Oberflächentechnik (IOT)
依托单位国家：
德国
项目类别：
Research Grants
财政年份：
2013
资助国家：
德国
起止时间：
2012-12-31 至 2020-12-31
项目状态：
已结题

来源：
https://gepris.dfg.de/gepris/projekt/235011713?language=en
关键词：
Synthesis analysis pure metal containing

项目摘要

The proposed project is based on the current project "HPPMS-C-Schichten" (BO 1979/33-1), which focuses on the deposition of a-C- and a-C:Me coatings for tribological applications by means of HPPMS (High Power Pulse Magnetron Sputtering) with varying energy input into the plasma. The use of neon as process gas led to an improvement of the coating properties. However, as a result of this project, a further improvement of the coating properties and the compound adhesion between coating and substrate of the deposited a-C(:Me) coatings is necessary in order to increase the suitability for tools in tribological applications such as Al machining. In this respect, promising results could be observed in our own preliminary work with the use of substrate temperatures TS < 250 °C as well as for a gradation of the substrate temperature. These effects should therefore be investigated in more detail for the deposition of a-C(:Me) coatings deposited by means of HPPMS.The overall objective of the proposed project is therefore a fundamental understanding of the cause-and-effect relationships of coating properties and the compound adhesion for the deposition of a-C and a-C:Me coatings by means of HPPMS at low substrate temperatures TS < 250 °C, in particular TS < 25 °C, and varying energy input into the plasma. For this purpose, the influence of the above-mentioned process parameters on basic coating properties such as the microstructure, the sp3/sp2 bond ratio or the residual stresses are correlated with the application-relevant mechanical properties, the compound adhesion and the thermal stability of the deposited coatings. The result of these investigations is a not yet available modified structure-zone model as well as a modeling of the cause-effect relationships for the low-temperature range TS < 250 °C for a-C(:Me) coatings. A further aim is the explanation of the influence of a substrate temperature gradation on the coating properties and the compound adhesion as well as the thermal resistance. The findings are intended to enable a targeted development of a-C(:Me) coatings on steel or hard metal substrates on tools for tribological applications. The substrate temperature is varied from TS = -90 °C to TS = 250 °C using a liquid contact cooling of the substrate holder. The variation of the energy input into the plasma is realized with different peak powers per pulse for the HPPMS. According to the findings of the ongoing project BO 1979/33-1 neon is used as process gas. For comparability, a-C(:Zr) coatings are considered. The investigations are as in BO 1979/33-1 carried out in a large-volume coating plant.

拟议项目基于当前项目“HPPMS-C-Schichten”（BO 1979/33-1），该项目侧重于通过HPPMS（高功率脉冲磁控溅射）在等离子体中输入不同能量的情况下沉积用于摩擦学应用的a-C-和a-C：Me涂层。使用氖作为工艺气体导致涂层性能的改善。然而，作为该项目的结果，进一步改善涂层性能和沉积的a-C（：Me）涂层的涂层和基底之间的化合物粘附是必要的，以增加在摩擦学应用中的工具的适用性，例如Al加工。在这方面，在我们自己的初步工作中，使用衬底温度TS < 250 °C以及衬底温度的梯度，可以观察到有希望的结果。因此，对于通过HPPMS沉积的a-C（：Me）涂层，应更详细地研究这些影响。因此，拟议项目的总体目标是从根本上了解涂层性能与a-C和a-C：Me涂层沉积的化合物附着力之间的因果关系，这些涂层是通过HPPMS在低基底温度TS < 250 °C，特别是TS < 25 °C，以及输入等离子体的不同能量下沉积的。为此目的，上述工艺参数对基本涂层性能如微观结构、sp3/sp2键合比或残余应力的影响与应用相关的机械性能、化合物粘附性和沉积涂层的热稳定性相关。这些研究的结果是一个尚未可用的修改结构区模型以及a-C（：Me）涂层低温范围TS < 250 °C的因果关系建模。另一个目的是解释衬底温度梯度对涂层性能和化合物粘附以及热阻的影响。这些发现旨在实现在用于摩擦学应用的工具上的钢或硬金属基底上的a-C（：Me）涂层的有针对性的开发。使用衬底保持器的液体接触冷却，衬底温度从TS = -90 °C变化到TS = 250 °C。输入到等离子体中的能量的变化是实现与不同的峰值功率每脉冲的HPPMS。根据正在进行的项目BO 1979/33-1的调查结果，氖被用作工艺气体。为了可比性，考虑a-C（：Zr）涂层。按照BO 1979/33-1的要求，在一个大容量涂料厂进行了研究。