Synthesis and Performance of Novel Polymer Resists for 193 nm Immersion Lithography

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The semiconductor industry is one of the largest world-wide, with annual revenue of $217B and employing over 1.5M people around the world. This project provides a unique opportunity for development within Australia of significant expertise in the field of polymers for short-wavelength lithography. The materials to be developed are expected to provide the basis of future genertions of microchips. In addition the materials have applications in other technologies which are manufactured in Australia, for example in spectactle lenses and optical fibres. A major outcome of this project will be establishment of Australia as a world-leader in this rapidly expanding field.