Advanced Lithographic Solutions using Block Copolymers: Integrating Self Assembly and Lithography

使用嵌段共聚物的先进光刻解决方案：集成自组装和光刻

• 批准号: LP0989607
• 负责人: Prof Andrew Whittaker
• 金额: $ 69.38万
• 依托单位: The University of Queensland
• 依托单位国家: 澳大利亚
• 项目类别: Linkage Projects
• 财政年份: 2009
• 资助国家: 澳大利亚
• 起止时间: 2009-01-01 至 2012-12-31
• 项目状态: 已结题
• 来源: https://dataportal.arc.gov.au/RGS/Web/Grants/LP0989607
• 关键词: Advanced; Lithographic; Solutions; using; Block

The semiconductor industry is one of the largest world-wide, with annual revenue of $220B and employing over 1.5M people around the world. This project provides a unique opportunity for development within Australia of significant expertise in the field of self assembly in photolithography. Plastics with tailored properties will be made and used to develop novel processes to reduce the defectivity in integrated circuit manufacture. The ultimate benefit will be faster and more energy efficient microprocessors. A major outcome of this project will be establishment of Australia as a world-leader in this rapidly expanding field. Furthermore, the technology can be applied broadly to many other applications such as high density data storage.

半导体行业是全球最大的行业之一，年收入为 $220B，在全球拥有超过 150 万员工。该项目为澳大利亚光刻自组装领域的重要专业知识的发展提供了独特的机会。将制造具有定制特性的塑料并用于开发新颖的工艺，以减少集成电路制造中的缺陷。最终的好处将是更快、更节能的微处理器。该项目的一个主要成果将是使澳大利亚成为这一快速扩张领域的世界领导者。此外，该技术还可以广泛应用于许多其他应用，例如高密度数据存储。