Advanced Lithographic Solutions using Block Copolymers: Integrating Self Assembly and Lithography

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The semiconductor industry is one of the largest world-wide, with annual revenue of $220B and employing over 1.5M people around the world. This project provides a unique opportunity for development within Australia of significant expertise in the field of self assembly in photolithography. Plastics with tailored properties will be made and used to develop novel processes to reduce the defectivity in integrated circuit manufacture. The ultimate benefit will be faster and more energy efficient microprocessors. A major outcome of this project will be establishment of Australia as a world-leader in this rapidly expanding field. Furthermore, the technology can be applied broadly to many other applications such as high density data storage.