Next-generation lithography: photo-directing assembly of block copolymers
Next-generation lithography: photo-directing assembly of block copolymers
批准号:
DP180101221
负责人:
Prof Andrew Whittaker
金额:
$36.37万
依托单位国家:
澳大利亚
项目类别:
Discovery Projects
财政年份:
2018
资助国家:
澳大利亚
项目状态:
已结题
起止时间:
2018-01-09 至 2022-12-30
中文摘要
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英文摘要
This project aims to introduce a novel approach to organising block polymers through the photochemical modification of the surface of a photo-sensitive polymer. Chemo-epitaxy is the science of organising materials on a surface decorated with chemical patterns. The process has the potential to revolutionise the manufacture of integrated circuits, enabling faster processors. This project expects to introduce innovative concepts in polymer chemistry and nanoscale assembly with the potential to advance a multi-billion-dollar industry.
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