Next-generation lithography: photo-directing assembly of block copolymers

下一代光刻：嵌段共聚物的光导组装

• 批准号: DP180101221
• 负责人: Prof Andrew Whittaker
• 金额: $ 36.37万
• 依托单位: The University of Queensland
• 依托单位国家: 澳大利亚
• 项目类别: Discovery Projects
• 财政年份: 2018
• 资助国家: 澳大利亚
• 起止时间: 2018-01-09 至 2022-12-30
• 项目状态: 已结题
• 来源: https://dataportal.arc.gov.au/RGS/Web/Grants/DP180101221
• 关键词: Next; generation; lithography; photo; directing

This project aims to introduce a novel approach to organising block polymers through the photochemical modification of the surface of a photo-sensitive polymer. Chemo-epitaxy is the science of organising materials on a surface decorated with chemical patterns. The process has the potential to revolutionise the manufacture of integrated circuits, enabling faster processors. This project expects to introduce innovative concepts in polymer chemistry and nanoscale assembly with the potential to advance a multi-billion-dollar industry.

本项目旨在介绍一种通过光敏聚合物表面的光化学改性来有机化嵌段聚合物的新方法。化学外延是一门科学，在表面装饰有化学图案的材料上组织。该工艺有可能彻底改变集成电路的制造，使处理器速度更快。该项目预计将在聚合物化学和纳米组装方面引入创新概念，并有可能推动数十亿美元的产业。