Plasma-enhanced atomic-layer deposition system with in situ spectroscopic ellipsometer

具有原位光谱椭圆计的等离子体增强原子层沉积系统

• 批准号: 411506355
• 金额: --
• 依托单位: Technische Universität München (TUM)
• 依托单位国家: 德国
• 项目类别: Major Research Instrumentation
• 财政年份: 2018
• 资助国家: 德国
• 起止时间: 2017-12-31 至 无数据
• 项目状态: 未结题
• 来源: https://gepris.dfg.de/gepris/projekt/411506355?language=en
• 关键词: Plasma; enhanced; atomic; layer; deposition

Funding is requested for a plasma-enhanced atomic layer deposition system equipped with in situ spectroscopic ellipsometry for process monitoring, as well as for comprehensive evaluation of deposited films. The integrated instrument will be installed in the Center for Nanomaterials and Nanotechnology (ZNN) of the Walter Schottky Institute, TUM. The system will be a key tool in the Pl's research dedicated to the development of nitride and oxynitride-based materials with application for conversion of sunlight into renewable fuels. Being a unique capability housed in the ZNN, the instrument will also support research into nanoscale systems, especially for energy conversion, within the broader Munich area. The PI is a new faculty member at TUM and envisions the submission of multiple new research proposals enabled by this capability. Initial research projects, will include the following: i) Development of nitride and oxynitride semiconductors, such as TaON and perovskite oxynitrides, for photoelectrochemical solar energy conversion, ii) Deposition and characterization of multi­functional thin films for photochemical stabilization of semiconductors and for high efficiency (photo)electrocatalysis, and iii) Operando characterization of charge extraction and efficiency loss mechanisms in advanced photochemical energy conversion systems. The proposed instrumentation will complement existing infrastructure and provides unique control over composition, phase, and reactivity that is necessary to pursue these research aims.

申请资金用于等离子体增强原子层沉积系统，该系统配备了原位光谱椭偏仪，用于过程监测以及沉积膜的综合评估。集成仪器将安装在慕尼黑工业大学沃尔特·肖特基研究所的纳米材料和纳米技术中心（ZNN）。该系统将成为Pl致力于开发氮化物和氧氮化物基材料的关键工具，用于将阳光转化为可再生燃料。作为ZNN的独特功能，该仪器还将支持纳米级系统的研究，特别是在更广泛的慕尼黑地区进行能量转换。PI是TUM的新教员，并设想通过该功能提交多个新的研究提案。初步研究项目将包括以下内容：1)开发用于光电化学太阳能转换的氮化物和氧化氮化物半导体，如TaON和钙钛矿氧化氮化物；2)用于半导体光化学稳定和高效（光）电催化的多功能薄膜的沉积和表征；3)先进光化学能量转换系统中电荷提取和效率损失机制的操作表征。提议的仪器将补充现有的基础设施，并提供对组成、相和反应性的独特控制，这是追求这些研究目标所必需的。