Development of Soft-X-Ray Multilayrs and Novel Multilayr Optics

软X射线多层膜和新型多层光学器件的开发

• 批准号: 04452099
• 负责人: YAMAMOTO Masaki
• 金额: $ 4.35万
• 依托单位: TOHOKU UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (B)
• 财政年份: 1992
• 资助国家: 日本
• 起止时间: 1992 至 1993
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-04452099/
• 关键词: Soft-X-Ray; Multilayr; Ultra-thin Film; Optical Constants; Soft-X-Ray Polarizer; Soft-X-Ray Phase Shifter; Transmission Multilayr; Soft-X-Ray Ellipsometry

Aim of this project is to develop soft-x-ray multilayrs of short period thickness of less than 6nm and also to develop novel multilayr optics, with fundamental study of growth process.We have established the reflectance vs. angle of incidence method and collected optical contants of C, Mo, Ru, Rh, W, Pt, Au, BK7 glass, and fused silica at several photon energies between 60 to 900eV.Correlation between reflectance and special frequency spectrum of surface roughness was olso studied.In-situ, ellipsometry was found useful for growth phase study including roughness smoothing and compound formation at boundaries.Multilayrs of Ru/B4C and Mo/B4C of 4.70 to 5.34nm period, fabricated by magnetron sputtering, were found to have 16 to 18% reflectance at 45ﾟ angle of incidence with 167.3 to 186.2eV soft-x-ray.By soft-x-ray ellipsometry, realized with high performance polarizers of >98% polarizance and phase shifters developped, relative amplitude attenuation Rp/Rs=tanPSIexp(iDELTA) of a thin Mo layr was measured for the first time.

本项目的目标是研制短周期厚度小于6 nm的软X射线多层膜，并开发新型多层膜光学器件，同时对多层膜的生长过程进行了基础研究，建立了反射率-入射角法，收集了C，Mo，Ru，Rh，W，Pt，Au，BK 7玻璃，在60 - 900 eV的几种光子能量下，研究了反射率与表面粗糙度频谱的相关性，椭圆偏振法被发现对于生长相研究很有用，包括粗糙度平滑和边界化合物的形成。Ru/B4 C和Mo/B4 C的多层膜周期为4.70至5.34nm，用磁控溅射法制备了45 °反射率为167.3 ~ 186.2eV的薄膜，用研制的偏振度>98%的高性能偏振片和移相器实现了软X射线椭圆偏振测量，首次测量了Mo薄层的相对振幅衰减Rp/Rs=tanPSIexp（iDELTA）。

项目成果

M.Yanagihara: "Performance of a wideband multilayer polarizer for soft x rays" Rev.Sci.Instrum.63. 1516-1518 (1992)

M.Yanagihara：“软 X 射线宽带多层偏振器的性能”Rev.Sci.Instrum.63。

Y.Goto: "Soft-X-Ray Reflectance of Short Period Ni/C Multilayer Mirrors" Photon Factory Activity Report. 10. 288 (1992)

Y.Goto：“短周期 Ni/C 多层镜的软 X 射线反射率”光子工厂活动报告。

柳原美廣: "軟X線多層膜反射鏡" 大学・高専・公設試験研究機関の研究情報. 2. 24-25 (1992)

Yoshihiro Yanagihara：“软 X 射线多层反射器”为大学、技术学院和公共研究机构提供的研究信息。2. 24-25 (1992)。

M.Yanagihara: "Soft-X-Ray optical constants measured with ultra-thin layr samples (in Japanese)" Bull. Res. Inst. Sci. Meas., Tohoku Univ.41. 1-26 (1992)

M.Yanagihara：“用超薄层样品测量的软 X 射线光学常数（日语）”Bull。

H.Nomura: "Design, fabricartion, and polarization of soft-x-ray transmission multilayrs" Proc. Soc. Photo-Opt. Instr. Eng.1720. 395-401 (1992)

H.Nomura：“软 X 射线透射多层膜的设计、制造和偏振”Proc。