Optimization of Particle Control by Boronization

通过渗硼优化颗粒控制

• 批准号: 04452310
• 负责人: SUGAI Hideo
• 金额: $ 3.14万
• 依托单位: Nagoya University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (B)
• 财政年份: 1992
• 资助国家: 日本
• 起止时间: 1992 至 1993
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-04452310/
• 关键词: boronization; boron coating; decaborane; diborane; oxygen gettering; hydrogen recycling; nuclear fusion; plasma CVD; デガボラン; シボラン; 不純物

We proposed a new method of boronization using less hazardous solid decaborane and obtained the following results on the coating technique, evaluation of boron films and the boronization effects.1. Development of Coating Techniques : Instead of toxic explossive diborane, a new solid boride (decaborane) was used under of the sublimation in vacuum. In addition, we established a boronization technique based on thermal CVD without discharge decomposition. A comparison between plasma CVD and thermal CVD was made for decaborane and diborane.2. Control of Hydrogen Content of Boron Film : A hydrogen content to be a measure of recycling was evaluated by resonant nuclear reaction analysis. The H content drastically decreased with increasing a wall temperature and also as a result of ion bombardment. Deuterized boronization by isotope exchange from H to D was accomplished by the way where D_2 is admixed in boron hydride gas or the film surface is conditioned by a D_2 glow discharge.3. Boronization Effects : Basic experimetns were performed to test the hydrogen recycling and the oxygen gettering after boronization.Finally, the decaborane-based boronization we proposed have been used in JT-60U, Heliotron E, and so on.

本文提出了一种新的硼化方法，即采用危害性较小的固体癸硼烷进行硼化，并在涂层工艺、硼膜评价和硼化效果等方面取得了如下研究结果.涂层技术的发展：用一种新的固体硼化物（癸硼烷）代替有毒的爆炸性乙硼烷，在真空中升华。此外，我们建立了一种基于热CVD无放电分解的硼化技术。对癸硼烷和乙硼烷的等离子体CVD和热CVD进行了比较.硼膜的氢含量的控制：通过共振核反应分析评估作为再循环的量度的氢含量。的H含量急剧下降，随着壁温的增加，也作为离子轰击的结果。采用硼氢化物气体中掺D_2或D_2辉光放电处理膜表面的方法，实现了H到D的同位素交换氘化.硼化效应：对硼化后的氢循环和氧吸除进行了初步的实验研究。最后，我们提出的十硼烷硼化方法已在JT-60 U、Heliotron E等器件上得到应用。

项目成果

M.Saidoh 他16名: "Initial Boronization of the JT-60U Tokamaku Using Decaborane" Japanese Journal of Applied Physics. 32. 3276-3281 (1993)

M. Saidoh 和其他 16 人：“使用十硼烷对 JT-60U 托卡玛库进行初始硼化”，《日本应用物理学杂志》32. 3276-3281 (1993)。

M.Yamage H.Sugai: "A New approach to Boronization of Fusion Devices" Jpn.J.Appl.Phys.32. (1993)

M.Yamage H.Sugai：“聚变装置硼化的新方法”Jpn.J.Appl.Phys.32。

H.Sugai et al.: "Plasma Assisted Surface Modification and Radical Diagnostics" J.Nucl.Mater.200. 403-411 (1993)

H.Sugai 等人：“等离子体辅助表面改性和自由基诊断”J.Nucl.Mater.200。

M.Saidoh: "Initial Boronization of the JT-60U Tokamaku Using Decaborane" Japanese Journal of Appled Physics. 32. 3276-3281 (1993)

M.Saidoh：“使用十硼烷对 JT-60U 托卡玛库进行初始硼化”，《日本苹果物理学杂志》。

M.Yamage 他4名: "Wall Temperature Dependence of Boronization Using Decaborane and Diborane" Japanese Journal of Applied Physics. 32. 3968-3974 (1993)

M.Yamage 和其他 4 人：“使用癸硼烷和乙硼烷进行硼化的壁温依赖性”日本应用物理学杂志 32. 3968-3974 (1993)。