In situ gravimetric monitoring of atomic layr epitaxy using

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In situ monitoring techniques play an important role in the investigation on the atomic layr epitaxy (ALE) growth mechanism. In this research, we have investigated in situ gravimetric monitoring of ALE using metalorganic sources. The main results obtained are summarized as follows :(1) The resistance furnace is suitable heating system for the substrate.(2) In the short purge time, which is used for the common ALE growth, the gtowth rate is unity in each ALE cycle. However, the growth rate decreases to the constant value, 0.75, for the long purge time, which corresponds to the As coverage on a (2x4) reconstructed surface.The gravimetric and optical in situ methods were employed in this study. These methods provides real-time information under an atmospheric pressure. In particular, the gravimetric method is a powerful tool for the investigation of the ALE mechanism.