Development of integrated optical measurement systems having layered structures
具有分层结构的集成光学测量系统的开发
基本信息
- 批准号:12555112
- 负责人:
- 金额:$ 2.62万
- 依托单位:
- 依托单位国家:日本
- 项目类别:Grant-in-Aid for Scientific Research (B)
- 财政年份:2000
- 资助国家:日本
- 起止时间:2000 至 2002
- 项目状态:已结题
- 来源:
- 关键词:
项目摘要
Some integrated optical measurement systems are developed for realizing the small size but having practical performance. The research is both the development of elements and the packaging of optical setup.Laser interferometer: By introducing the photodiode with the thickness near to the optical wavelength, the standing wave detection-type interferometer is realized at the volume of fingertip (φ 〜 2.5cm). The optical setup is realized by stacking a polarizer, a quarter 2 plate, and the thin film photodiode on the housing of the collation lens of the laser diode. The interferometer signal magnitude is 1 μ A detecting the movement at the speed of 9cm/s. This is near to the practical specification. The standing wave in the speckle pattern is also measured realizing the measurement of the sample having rough surface. Now. Fabry-perot resonant cavity is combined for increasing the signal intensity and for purifying the interference signal. The effect is clearly observed, and tuning to the accurate resonant condition is aimed.Optical encoder: The grating can be combined on the Si microstructure realizing new types of encoder. The imaging type encoder has the problem that the optical setup becomes complicated with the increasing number of grating. Since the grating can be integrated at the aligned position, the alignment problem is reduced realizing the automatic setting at the position serving the high image contrast. Additionally, the modulated pitch of the detection grating can cancel the higher order noise. The total encoder system is demonstrated combining with the LED chip and the IC chip. At present, the emitting field is spatially narrow and optical averaging effect is limited. The illumination optics is under the revision.As scheduled, optical systems are demonstrated clearing the fundamental performance by stacking planer elements. Sensors are confirmed to be effective for realizing the integrated sensor systems.
为实现体积小、性能实用,研制了几种集成光学测量系统。激光干涉仪:通过引入厚度接近光学波长的光电二极管,实现指尖体积(φ~2.5 cm)处的驻波探测型干涉仪。光学设置是通过在激光二极管的对准透镜的外壳上堆叠偏振器、四分之一2片和薄膜光电二极管来实现的。干涉仪信号量级为1μA,检测速度为9 cm/S,接近实际技术指标。并对散斑图案中的驻波进行了测量,实现了对粗糙表面样品的测量。现在。采用法布里-珀罗谐振腔相结合的方法来提高信号强度和净化干扰信号。光学编码器:将光栅与硅微结构相结合,实现了新型编码器。成像型编码器存在着随着光栅数量的增加而使光学设置变得复杂的问题。由于可以在对准位置集成光栅,因此减少了对准问题,实现了在服务于高图像对比度的位置的自动设置。此外,检测光栅的调制节距可以抵消高阶噪声。结合LED芯片和IC芯片,对整个编码器系统进行了演示。目前,发射光场在空间上很窄,光平均效应有限。照明光学系统正在修订中。按照计划,光学系统将通过堆叠平面元件来清除基本性能。传感器被证实是实现集成传感器系统的有效手段。
项目成果
期刊论文数量(54)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
X. Mi, M. Sasaki, T. Hirano, K. Hane: "Interferometers based on standing wave detection using thin film photodiodes"Trans. IEE of Japan. 121-E-9. 489-495 (2001)
X. Mi、M. Sasaki、T. Hirano、K. Hane:“基于使用薄膜光电二极管的驻波检测的干涉仪”Trans。
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K Hane, T. Endo, M. Ishimori, Y. Ito, M. Sasaki: "Integration of grating-type encoder using Si micromachining"Sensors and Actuators A. 97-98. 136-146 (2002)
K Hane、T. Endo、M. Ishimori、Y. Ito、M. Sasaki:“使用 Si 微加工集成光栅型编码器”传感器和执行器 A. 97-98。
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ミイシャオユウ, 佐々木実, 羽根一博: "正弦波信号が得られる定在波検出型レーザ干渉計"第49回応用物理学関係連合講演会. (発表予定). (2002)
Oyu Miisha、Minoru Sasaki、Kazuhiro Hane:“可以获得正弦信号的驻波检测型激光干涉仪”第49届应用物理学会讲座(待发表)。
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K.Hane, T.Endo, M.Sasaki: "Si Micromachined Optical Encoder Based on Grating Imaging"Digest of Technical Papers, the 11^<th> International Conference on Solid-State Sensors and Actuators. Vol.1. 552-555 (2001)
K.Hane、T.Endo、M.Sasaki:“基于光栅成像的硅微机械光学编码器”技术论文文摘,第 11 届固态传感器和执行器国际会议。
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家城淳, 羽根一博, 横山省治将史, 松井圭司, 梨木政行, 佐々木実: "変調型フォトダイオードアレイを用いた絶対位置検出光エンコーダ"日本機械学会論文集C偏. 67. 74-79 (2001)
Jun Iashiro、Kazuhiro Hane、Masashi Yokoyama、Keiji Matsui、Masayuki Nashiki、Minoru Sasaki:“使用调制光电二极管阵列的绝对位置检测光学编码器”日本机械工程师学会会议录,C 部分 C.67.74-79 (2001)
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SASAKI Minoru其他文献
Automatic thesaurus construction using word clustering
使用词聚类自动构建同义词库
- DOI:
- 发表时间:
2003 - 期刊:
- 影响因子:0
- 作者:
SASAKI Minoru;SHINNOU Hiroyuki - 通讯作者:
SHINNOU Hiroyuki
Information Retrieval System using Latent Contextual Relevance
使用潜在上下文相关性的信息检索系统
- DOI:
- 发表时间:
2004 - 期刊:
- 影响因子:0
- 作者:
SASAKI Minoru;SHINNOU Hiroyuki - 通讯作者:
SHINNOU Hiroyuki
Unsupervised learning of word sense disambiguation rules by estimating an optimum iteration number in the EM algorithm
通过估计 EM 算法中的最佳迭代次数来无监督学习词义消歧规则
- DOI:
- 发表时间:
2003 - 期刊:
- 影响因子:0
- 作者:
SHINNOU Hiroyuki;SASAKI Minoru - 通讯作者:
SASAKI Minoru
知的情報検索のための大規模言語データの利用
利用大规模语言数据进行智能信息检索
- DOI:
- 发表时间:
2004 - 期刊:
- 影响因子:0
- 作者:
SHINNOU Hiroyuki;SASAKI Minoru;福本 文代 - 通讯作者:
福本 文代
Using Very Large Corpora for Intelligent Information Retrieval
使用超大型语料库进行智能信息检索
- DOI:
- 发表时间:
2004 - 期刊:
- 影响因子:0
- 作者:
SHINNOU Hiroyuki;SASAKI Minoru;F.Fukumoto - 通讯作者:
F.Fukumoto
SASAKI Minoru的其他文献
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{{ truncateString('SASAKI Minoru', 18)}}的其他基金
Research on method of extracting collocation for each word sense and its application for word sense disambiguation
词义搭配提取方法及其在词义消歧中的应用研究
- 批准号:
24700131 - 财政年份:2012
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$ 2.62万 - 项目类别:
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Development of Wearable Respiratory Sensor and Practical Application
可穿戴式呼吸传感器的研制及实际应用
- 批准号:
24650397 - 财政年份:2012
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$ 2.62万 - 项目类别:
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The identification of cell surface antigen of oral streptococcus for development of vaccine for oral cancer
口腔链球菌细胞表面抗原的鉴定用于口腔癌疫苗的研制
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22592046 - 财政年份:2010
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Highly sensitive infra-red sensor using non-linear vibration
使用非线性振动的高灵敏度红外传感器
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21656105 - 财政年份:2009
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$ 2.62万 - 项目类别:
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A study of self-sensing control of hydrophilic electrolytic polymer actuator
亲水性电解聚合物驱动器自传感控制研究
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20560235 - 财政年份:2008
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Stabilized Temperature Characteristics, High-Speed Response, and Low-Voltage Driving of Micromirror
微镜温度特性稳定、高速响应、低电压驱动
- 批准号:
19016003 - 财政年份:2007
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Grant-in-Aid for Scientific Research on Priority Areas
High-performance MEMS devices realized by three-dimensional photolithography
三维光刻实现的高性能MEMS器件
- 批准号:
18681023 - 财政年份:2006
- 资助金额:
$ 2.62万 - 项目类别:
Grant-in-Aid for Young Scientists (A)
Control of a Micro-Actuator for the Hard Disk Drive using Self-Sensing Actuation
使用自感致动控制硬盘驱动器微致动器
- 批准号:
17560224 - 财政年份:2005
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Grant-in-Aid for Scientific Research (C)
Using senescence-accelerated mouse (SAM) strains and aged C57/BL/6 mice, we examined the senescence-related changes of mucosal immune responses.
使用衰老加速小鼠 (SAM) 品系和老年 C57/BL/6 小鼠,我们检查了粘膜免疫反应的衰老相关变化。
- 批准号:
14571744 - 财政年份:2002
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Tele-operation of Flexible Manipulator by using Bio-potential Signals
利用生物电信号遥控柔性机械臂
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12650247 - 财政年份:2000
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$ 2.62万 - 项目类别:
Grant-in-Aid for Scientific Research (C)
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