权益分类	功能权益	普通用户	{{item.name}}会员
{{category.name}}	{{benefitItem.name}}

Development of integrated optical measurement systems having layered structures

具有分层结构的集成光学测量系统的开发

基本信息

批准号：
12555112
负责人：
SASAKI Minoru
金额：
$ 2.62万
依托单位：
Tohoku University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2000
资助国家：
日本
起止时间：
2000 至 2002
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-12555112/
关键词：
photodiode integration stacking structure interferometer standing wave resonant cavity encoder grating 直接接合

项目摘要

Some integrated optical measurement systems are developed for realizing the small size but having practical performance. The research is both the development of elements and the packaging of optical setup.Laser interferometer: By introducing the photodiode with the thickness near to the optical wavelength, the standing wave detection-type interferometer is realized at the volume of fingertip (φ 〜 2.5cm). The optical setup is realized by stacking a polarizer, a quarter 2 plate, and the thin film photodiode on the housing of the collation lens of the laser diode. The interferometer signal magnitude is 1 μ A detecting the movement at the speed of 9cm/s. This is near to the practical specification. The standing wave in the speckle pattern is also measured realizing the measurement of the sample having rough surface. Now. Fabry-perot resonant cavity is combined for increasing the signal intensity and for purifying the interference signal. The effect is clearly observed, and tuning to the accurate resonant condition is aimed.Optical encoder: The grating can be combined on the Si microstructure realizing new types of encoder. The imaging type encoder has the problem that the optical setup becomes complicated with the increasing number of grating. Since the grating can be integrated at the aligned position, the alignment problem is reduced realizing the automatic setting at the position serving the high image contrast. Additionally, the modulated pitch of the detection grating can cancel the higher order noise. The total encoder system is demonstrated combining with the LED chip and the IC chip. At present, the emitting field is spatially narrow and optical averaging effect is limited. The illumination optics is under the revision.As scheduled, optical systems are demonstrated clearing the fundamental performance by stacking planer elements. Sensors are confirmed to be effective for realizing the integrated sensor systems.

为实现体积小、性能实用，研制了几种集成光学测量系统。激光干涉仪：通过引入厚度接近光学波长的光电二极管，实现指尖体积(φ~2.5 cm)处的驻波探测型干涉仪。光学设置是通过在激光二极管的对准透镜的外壳上堆叠偏振器、四分之一2片和薄膜光电二极管来实现的。干涉仪信号量级为1μA，检测速度为9 cm/S，接近实际技术指标。并对散斑图案中的驻波进行了测量，实现了对粗糙表面样品的测量。现在。采用法布里-珀罗谐振腔相结合的方法来提高信号强度和净化干扰信号。光学编码器：将光栅与硅微结构相结合，实现了新型编码器。成像型编码器存在着随着光栅数量的增加而使光学设置变得复杂的问题。由于可以在对准位置集成光栅，因此减少了对准问题，实现了在服务于高图像对比度的位置的自动设置。此外，检测光栅的调制节距可以抵消高阶噪声。结合LED芯片和IC芯片，对整个编码器系统进行了演示。目前，发射光场在空间上很窄，光平均效应有限。照明光学系统正在修订中。按照计划，光学系统将通过堆叠平面元件来清除基本性能。传感器被证实是实现集成传感器系统的有效手段。