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Development of integrated optical measurement systems having layered structures

具有分层结构的集成光学测量系统的开发

基本信息

批准号：
12555112
负责人：
SASAKI Minoru
金额：
$ 2.62万
依托单位：
Tohoku University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2000
资助国家：
日本
起止时间：
2000 至 2002
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-12555112/
关键词：
photodiode integration stacking structure interferometer standing wave resonant cavity encoder grating 直接接合

项目摘要

Some integrated optical measurement systems are developed for realizing the small size but having practical performance. The research is both the development of elements and the packaging of optical setup.Laser interferometer: By introducing the photodiode with the thickness near to the optical wavelength, the standing wave detection-type interferometer is realized at the volume of fingertip (φ 〜 2.5cm). The optical setup is realized by stacking a polarizer, a quarter 2 plate, and the thin film photodiode on the housing of the collation lens of the laser diode. The interferometer signal magnitude is 1 μ A detecting the movement at the speed of 9cm/s. This is near to the practical specification. The standing wave in the speckle pattern is also measured realizing the measurement of the sample having rough surface. Now. Fabry-perot resonant cavity is combined for increasing the signal intensity and for purifying the interference signal. The effect is clearly observed, and tuning to the accurate resonant condition is aimed.Optical encoder: The grating can be combined on the Si microstructure realizing new types of encoder. The imaging type encoder has the problem that the optical setup becomes complicated with the increasing number of grating. Since the grating can be integrated at the aligned position, the alignment problem is reduced realizing the automatic setting at the position serving the high image contrast. Additionally, the modulated pitch of the detection grating can cancel the higher order noise. The total encoder system is demonstrated combining with the LED chip and the IC chip. At present, the emitting field is spatially narrow and optical averaging effect is limited. The illumination optics is under the revision.As scheduled, optical systems are demonstrated clearing the fundamental performance by stacking planer elements. Sensors are confirmed to be effective for realizing the integrated sensor systems.

为实现体积小但性能实用，研制了一些集成光学测量系统。研究内容包括元件的开发和光学装置的封装。激光干涉仪：通过引入厚度接近于光波长的光电二极管，在指尖体积（φ ~ 2.5cm）处实现驻波探测型干涉仪。该光学装置是通过将偏光片、四分之一板和薄膜光电二极管叠加在激光二极管的准直透镜外壳上来实现的。干涉仪信号量级为1 μ A，检测速度为9cm/s的运动。这很接近实际规格。还测量了散斑图中的驻波，实现了对具有粗糙表面的样品的测量。现在。法布里-珀罗谐振腔用于增加信号强度和净化干扰信号。该效应被清楚地观察到，并调谐到准确的谐振条件。光学编码器：将光栅组合在硅微结构上，实现新型编码器。随着光栅数量的增加，成像型编码器存在光学设置复杂的问题。由于光栅可以在对准位置集成，从而减少了对准问题，实现了高图像对比度位置的自动设置。此外，检测光栅的调制节距可以抵消高阶噪声。结合LED芯片和集成电路芯片，演示了整体编码器系统。目前，发射场空间狭窄，光学平均效应有限。照明光学系统正在改进中。按照计划，光学系统被证明通过堆叠平面元件来清除基本性能。传感器被证实是实现集成传感器系统的有效手段。