Development of low-damage low-temperature surface modification technique using laser detonation-induced broad atom beams

点击翻译按钮获取中文摘要

This study aims at developing the new low-damage surface modification technique using laser detonation supersonic atoms beams. It was made clear that the hydrogen-terminated Si (001) surface can be oxidized by 5 eV atomic oxygen beam even at room temperature. This is due to the fact that more than 80 % of the translational energy was transferred from the impinging atom to the surface atom. The overall oxide growth follows linear-parabolic relationship that is similar to that observed high-temperature oxidation of Si. The initial linear growth was governed by the reaction-limit of oxidant, whereas parabolic one was due to volume diffusion inside the oxide film. It was also demonstrated that the surface free energy (or wettability) of polymer could be controlled by atom beam exposures. From the experimental results obtained in this study, potential advantages of the laser detonation supersonic beam-induced surface modification were identified.