Development of the Angular Resolved Reflection High Energy Electron Diffraction and the Electron Impact Mass Spectroscopy for the Studies of Three Dimensional Structure of Surfaces

角分辨反射高能电子衍射仪(AR-RHEED)是为研究固体表面的三维结构而设计和研制的，它工作在10^~(-8)~(-8)的极真空中。用二硫化钼(MoS_2)单晶(0001)对这种AR-RHEED的性能和可靠性进行了检验，在每个入射角下都得到了清晰的条纹。在MoS_2衬底上制备了分子束外延(MBE)C&lt；60&gt；薄膜，并用AR-RHEED分析了其超晶格结构。用范德瓦尔斯外延，已经得到了。AR-RHEED分析表明，分子束外延生长的C&lt；60&gt；从成核开始就具有非常光滑的表面几何结构。C&lt；60&gt；的晶格常数为1 nm，因此AR-RHEED具有足够的分辨率来识别亚纳米级。对计算机硬盘的表面结构进行了实际应用测试。从PFPE润滑剂和无定形碳中识别出卤环。由于碳膜的厚度(10 Nm)，无法检测到磁性存储介质(溅射的Co-Cr-Ta-Pt)。这意味着目前的AR-RHEED对表面很敏感。对气体解吸质谱检测进行了尝试。然而，为了定量地识别F、C、0等，需要重新设计Q质量的极片。使用AR-RHEED的电子束作为能量损失光谱仪所需的EELS光谱仪。

Angular resolved reflection high energy electron diffraction (AR-RHEED), which works in an extreme vacuum of 10^<-8>, has been designed and developed to study three dimensional structure of solid surfaces. The function and reliability of this AR-RHEED has been examined by using molybdenum disulfide (MoS_2) single crystal (0001), and clear streak patterns were obtained at every incident angles. Molecular beam epitaxially (MBE) grown C_<60> films on MoS_2 were prepared and analyzed by AR-RHEED.Superlattice structure of MBE grown C_<60>. with the van der Waals epitaxy, has been obtained. AR-RHEED showed that the MBE grown C_<60> had very smooth surface geometry from the onset of nucleation. The lattice constant of C_<60> is 1 nm, and thus AR-RHEED has an enough resolution to identify sub-nanometers. Surface structure of computer hard disks was tested for practical applications. Halo rings both from PFPE lubricant and from amorphous carbon were recognized. Due to the thickness of carbon films (l0nm), it was unable to detect magnetic storage media (sputtered CO-Cr-Ta-Pt). This implies that the present AR-RHEED is sensitive to surface. The detection of desorption mass spectroscopy of gases was attempted. However, to quantitatively identify F, C, 0 etc., re-design of pole piece of Q-mass was needed. Use of e-beam of the AR-RHEED as an energy loss spectroscopy required EELS spectrometer.