Development of the Angular Resolved Reflection High Energy Electron Diffraction and the Electron Impact Mass Spectroscopy for the Studies of Three Dimensional Structure of Surfaces

角分辨反射高能电子衍射仪（AR-RHEED）工作在10^<-8>的极端真空中，用于研究固体表面的三维结构。用二硫化钼（MoS_2）单晶（0001）测试了AR-RHEED的功能和可靠性，在每个入射角都获得了清晰的条纹图。在MoS_2上制备了C_<60>的分子束外延生长（MBE）薄膜，并用AR-RHEED对其进行了分析。C_<60>生长的MBE的超晶格结构。用范德华外延得到。AR-RHEED表明，C_<60>生长的MBE从成核开始就具有非常光滑的表面几何形状。C_<60>的晶格常数为1 nm，因此AR-RHEED具有足够的分辨亚纳米的分辨率。为了实际应用，对计算机硬盘的表面结构进行了测试。从PFPE润滑油和非晶碳中都识别出了光环环。由于碳膜厚度（10nm），无法检测到磁存储介质（溅射CO-Cr-Ta-Pt）。这表明AR-RHEED对表面敏感。对气体的解吸质谱检测进行了尝试。但是，为了定量识别F、C、0等，需要重新设计q -质量的极片。使用AR-RHEED的电子束作为能量损失光谱需要EELS光谱仪。

Angular resolved reflection high energy electron diffraction (AR-RHEED), which works in an extreme vacuum of 10^<-8>, has been designed and developed to study three dimensional structure of solid surfaces. The function and reliability of this AR-RHEED has been examined by using molybdenum disulfide (MoS_2) single crystal (0001), and clear streak patterns were obtained at every incident angles. Molecular beam epitaxially (MBE) grown C_<60> films on MoS_2 were prepared and analyzed by AR-RHEED.Superlattice structure of MBE grown C_<60>. with the van der Waals epitaxy, has been obtained. AR-RHEED showed that the MBE grown C_<60> had very smooth surface geometry from the onset of nucleation. The lattice constant of C_<60> is 1 nm, and thus AR-RHEED has an enough resolution to identify sub-nanometers. Surface structure of computer hard disks was tested for practical applications. Halo rings both from PFPE lubricant and from amorphous carbon were recognized. Due to the thickness of carbon films (l0nm), it was unable to detect magnetic storage media (sputtered CO-Cr-Ta-Pt). This implies that the present AR-RHEED is sensitive to surface. The detection of desorption mass spectroscopy of gases was attempted. However, to quantitatively identify F, C, 0 etc., re-design of pole piece of Q-mass was needed. Use of e-beam of the AR-RHEED as an energy loss spectroscopy required EELS spectrometer.