Atomic layer deposition of ternary oxides of platinum group elements

铂族元素三元氧化物的原子层沉积

• 批准号: 511260074
• 负责人: Professor Dr. Stuart Parkin
• 金额: --
• 依托单位: Department of Nano-Systems from ions, spins and electrons (NISE)
• 依托单位国家: 德国
• 项目类别: Research Grants
• 资助国家: 德国
• 项目状态: 未结题
• 来源: https://gepris.dfg.de/gepris/projekt/511260074?language=en
• 关键词: Atomic; layer; deposition; ternary; oxides

Atomic layer deposition (ALD) of multiple oxides containing noble metals (apart from Cu) has been little studied, although ALD processes are well developed for the platinum group elemental metals and many of their simple oxides. However, the multiple oxides have technologically very important properties, so that investigations into deposition processes for thin layers of these oxides and their characterizations are of great interest. The group of ternary noble metal oxides includes, among other things, the crystal groups of delafossite and pyrochlore iridate. In particular, the delafossites PdCoO2, PdCrO2, and PtCoO2 have received some attention in recent years because of their high conductivity in the form of single crystals. This is due to the high mobility of the electrons within the two-dimensional noble metal-containing layers, which also makes these materials candidates for the observation of hydrodynamic electron flow. Calculations have shown that PtCoO2 is a promising material for spintronic applications. Furthermore, it has recently been demonstrated that all three materials are excellent electrocatalysts for the hydrogen evolution reaction in acidic electrolytes, even surpassing platinum under certain conditions. Pyrochlorine iridates have received increased interest in recent years because of the combination of electron correlation and spin-orbit coupling leading to effects such as metal–semiconductor transitions and non-collinear antiferromagnetism. It is also worth mentioning here the prediction that Y2Ir2O7 should exhibit the properties of a Weyl semimetal in a certain temperature range. Weyl semimetals are currently an intensively studied material class in the field of topological materials. The scientific project pursues the goal of depositing and characterizing thin layers of ternary oxides, in which one of the metals belongs to the platinum group, from the gas phase using ALD. The focus is on two crystal groups, the delafossites (PdCoO2, PdCrO2 and PtCoO2) and the pyrochlore iridates (Y2Ir2O7). Amorphous layers are first deposited for the various materials. From these, crystalline layers are obtained by means of rapid thermal processing. The layers are then analyzed for their elemental composition and crystal structure. Finally, the physical properties such as the temperature-dependent electrical conductivity and the magnetic ordering of films for which the desired crystalline phase has been achieved are studied in detail. The aim is to determine the relationships between the process conditions and these physical properties.

含有贵金属（除了Cu）的多种氧化物的原子层沉积（ALD）很少被研究，尽管ALD工艺对于铂族元素金属和它们的许多简单氧化物已经发展得很好。然而，多种氧化物具有技术上非常重要的性质，因此对这些氧化物的薄层的沉积工艺及其表征的研究具有极大的兴趣。三元贵金属氧化物的组尤其包括铜铁矿和烧绿石铱酸盐的晶体组。特别是铜铁矿PdCoO 2、PdCrO 2和PtCoO 2，由于其单晶形式的高导电性，近年来受到一些关注。这是由于二维含贵金属层内电子的高迁移率，这也使得这些材料成为观察流体动力学电子流的候选材料。计算表明，PtCoO 2是一种很有前途的自旋电子学应用材料。此外，最近已经证明，所有三种材料都是酸性电解质中析氢反应的优异电催化剂，在某些条件下甚至超过铂。近年来，由于电子关联和自旋轨道耦合的结合，导致诸如金属-半导体转变和非共线反铁磁性等效应，焦氯铱酸盐受到越来越多的关注。这里还值得一提的是，Y2 Ir 2 O 7在一定温度范围内应表现出外尔半金属的性质。外尔半金属是目前拓扑材料领域中研究较为深入的一类材料。该科学项目追求的目标是使用ALD从气相沉积和表征三元氧化物薄层，其中一种金属属于铂族。重点是两个晶体组，铜铁矿（PdCoO 2，PdCrO 2和PtCoO 2）和烧绿石铱酸盐（Y2 Ir 2 O 7）。首先为各种材料沉积非晶层。通过快速热处理从这些材料中获得结晶层。然后分析这些层的元素组成和晶体结构。最后，如温度依赖的电导率和磁有序的薄膜，其中所需的晶相已经实现的物理性能进行了详细研究。目的是确定工艺条件与这些物理性能之间的关系。