Application of New Materials to Designing of "Nano-mechanism"

研究了树脂混凝土、精细陶瓷、压电驱动器等新材料在超精密机床设计中的应用。树脂混凝土由于具有较高的阻尼率和较低的导热系数，适合作为该机的基材。对其力学性能进行了测试，并考虑了设计规范。精细陶瓷：氧化铝和氧化锆，具有很高的耐磨性，被认为是适合用作滑道面层的材料。在常压和真空环境下测试了它们的摩擦特性，并与氟树脂进行了比较。氧化铝陶瓷具有高的比硬度，自重变形小，易于研磨精密加工。因此，它更适合作为超精密直线导轨的结构材料。这些应用程序也进行了测试。直线电机可以非常合理地驱动滑块，而不需要螺丝和螺母。但导轨摩擦会影响进给速度的稳定性等性能。并对其效果和控制方法进行了研究。压电式执行器有望实现高分辨率的精密直线进给运动。将其应用于切割深度控制，得到了线性度较好的纳米级进给结果。此外，该压电体还被应用于精密对准机构，例如用于光纤插头加工的专用机床。采用多孔烧结尼龙作为真空卡盘面材料，对其夹持性能进行了试验研究。

The applications of so-called new materials; resin concrete, fine ceramics, piezo-electric actuater and so on, to the ultra precise machine tool design are investigated. Resin concrete suits for the base material of the machine mainly because of its high damping ratio and low coefficient of thermal conductivity. Its mechanical properties were tested and design rules were considered. Fine ceramics; alumina and zirconia, have high wear resistance and considered to be suitable for the slideway face material. Their frictional characteristics were tested both in atmospheric and vacuum environment, comparing with the fluoric resin. Alumina ceramics have high specific rigidity resulting in smaller deformation by its own weight and are easy to be finished precisely by lapping. Therefore it is preferable as the ultra precision linear guide structural material. Such applications were also tested. Linear motor can drive slider very reasonably without the need of screw and nut. But the slideway friction affects the stability of feed velocity and other performances. Its effect as well as the control method are investigated. Piezo-electric actuater is expected to be able to realize the precise linear feed motion with very high resolution. It was applied to the depth of cut control, showing the results of nanometer order feed with acceptable linearity. Also the piezo was applied to the precise alignment mechanism, for example, a special machine tool for optical-fiber plug machining. The workpiece deformation due to chucking should be restrained as small as possible.Porous sintered nylon were tested as the vacuum chuck face material, and the chucking properties are investigated.