Development of Surface Treatment Method for Ultra-Fine Powder Particles for Elastic Emission Machining (EEM)

弹性发射加工（EEM）用超细粉末颗粒表面处理方法的开发

• 批准号: 01850031
• 负责人: MORI Yuzo
• 金额: $ 5.06万
• 依托单位: Osaka University, The Faculty of Engineering
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research (B).
• 财政年份: 1989
• 资助国家: 日本
• 起止时间: 1989 至 1990
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-01850031/
• 关键词: EEM; Powder Particle; Surface Modification; Classification; Plasma; CVD; プラズマCVD; 表面処理; コ-ティング; RFプラズマ

To adapt EEM (Elastic Emission Machining) for various materials, it is necessary to make powder with adequate surface character. And coating any materials on small powder particles which sizes are constant was carried out. Concretely, we use Plasma Chemical Vapor Deposition which process can be done under low temperature so that cohesion of powder particles can be avoided.The following results are obtained.(1) In 1989, Plasma CVD apparatus for powder surface improvement was constructed. And we confirmed that required performance had been established. After that, we made the powder feed instrument and feed efficiency was improved sharply.(2) The powder particles movement by gas flow in the Plasma CVD chamber was analyzed and it was realized that classification of the diameters of powder particles can be done. In the constructed instrument, classification of particle which size is within 0.03 mum and 1 mum can be held.(3) We usually used SiO_2 particle, but from the view point of dispersibility we decided to use Latex (polystyrene powder). The melting point of Latex is lower than SiO_2, so we cannot take coating process in plasma. Then we improved the surface processing apparatus to be able to take out of plasma. After that, we coated Al_2O_3 on Latex particle and EEM experiment with those Latex was carried out. Then we realized that machining velocity has the same tendency with pure Al_2O_3 particle.

为了使 EEM（弹性发射加工）适用于各种材料，必须使粉末具有足够的表面特性。并将任何材料涂覆在尺寸恒定的小粉末颗粒上。具体来说，我们采用等离子化学气相沉积法，该工艺可以在低温下进行，从而可以避免粉末颗粒的内聚。得到了以下结果： (1) 1989年，建造了用于粉末表面改性的等离子CVD装置。我们确认所需的性能已经确定。此后，我们制作了供粉装置，供粉效率大幅提高。(2)对等离子体CVD腔体内气流作用下粉末颗粒的运动进行了分析，实现了对粉末颗粒直径的分级。在所构建的仪器中，可以对0.03μm和1μm以内的颗粒进行分级。(3)我们通常使用SiO_2颗粒，但从分散性的角度考虑，我们决定使用Latex(聚苯乙烯粉末)。 Latex的熔点低于SiO_2，因此不能采用等离子涂层工艺。然后我们改进了表面处理设备，使其能够取出等离子体。之后，我们将Al_2O_3涂覆在乳胶颗粒上，并用这些乳胶进行了EEM实验。然后我们发现加工速度与纯Al_2O_3颗粒具有相同的趋势。