Development of the appratus for making the ultra-fine particles for EEM utilizing atmospheric plasma CVD

本研究旨在制备用于弹性发射加工的超细颗粒。电火花加工是一种利用颗粒表面与工作表面之间的固相化学反应进行精密加工的方法。因此，每个表面原子的化学性质和反应活性是非常重要的。为了获得高效的加工性能，必须选择颗粒和做功的最佳组合。为了保护大气中的等离子体不受弧光放电的影响，在电极表面涂覆了陶瓷。实现了利用大气等离子体化学气相沉积制备EEM用超细粒子的装置。利用该装置研究发现，SiH_4是由SiH_4制得的超细颗粒(直径约50 nm)，并且以He为载气比以Ar为载气更能有效地分解SiH_4。研究还发现，在等离子体区域后直接将超细粒子分散到纯水中(大气压的优点)，超细粒子的收集效率可达近100%。

This study aims at making ultra-fine particles for EEM (Elastic Emission Machining). EEM is one of the most precision machining method, utilizing chemical reaction in solid phase between the particle surface and the work surface. So that chemical properties and reactivities of each surface atoms is very important. And it is neccesary to select the optimum combination of the particle and the work to achieve efficient machining properties.To protect atmospheric plasma from arc discharge, the electrode surface was coated with ceramics. And the appratus for making the ultra-fine particles for EEM utilizing atmospheric plasma CVD was realized. Using the appratus, it was found that ultra-fine particles (about 50nm in diameter) of Si was made from SiH_4, and that SiH_4 was decomposed more efficiently by using He than Ar as carrier gas. It was also found that to collect the ultra-fine particles just after the plasma region dispersively directly to the pure water (the atmospheric pressure's merit), the collection efficency of the ultra-fine particles was up to nearly 100%.