Microactuators Composed of Silicon Microstructures with a Tunneling-current-Displacement Sensor

带有隧道电流位移传感器的硅微结构微执行器

基本信息

  • 批准号:
    63850053
  • 负责人:
  • 金额:
    $ 5.18万
  • 依托单位:
  • 依托单位国家:
    日本
  • 项目类别:
    Grant-in-Aid for Developmental Scientific Research (B).
  • 财政年份:
    1988
  • 资助国家:
    日本
  • 起止时间:
    1988 至 1990
  • 项目状态:
    已结题

项目摘要

The purpose of this research is to fabricate a micro miniature moving mechanism together with a displacement sensor on a silicon wafer and to obtain micro motion devices integrated with the displacement sensor of nm-order accuracy. Especially, this study focussed on the IC-based micromachining of a tunneling current unit which is built of many components now. Following results are obtained :(1) A silicon diaphragm with thicknesses of around 10 mum was bent electrostatically. The displacement at the center of the diaphragm was utilized as a Z-direction actuator. The silicon wafer was etched an-isotropically with KOH. The displacement was measured by the electrostatic displacement sensor and controlled through the feedback loop. The rise time was 1 ms and the accuracy was 100 nm.(2) An approximate formula to calculate the deformation of the diaphragm was deduced based on the energy principle. Experimental values fit the theoretical curve. It is possible to design a diaphraghm actuator with the formula.(3) A sharp tungsten needle was fixed at the center of the diaphragm. The diaphragm was electrosatically driven to sustain the gap between the needle and a target. The gap was in the order of 1 nm and the tunneling current from 1 to 100 nA was detected.(4) Electrostatic actuators made of a poly-silicon thin film were fabricated. The actuators will be used to drive the target in a X-Y plane parallel to the substrate surface. One actuator had comb-like structures with overlapped teeth as an electrostatic drive. The other had parallel-plate actuators attached at two opposing end of a parallelogram flexture. These actuators were electorstatically driven. AX-Y stage with 4 of second type actuators were fabricated.
本研究的目的是在硅片上制作微小型移动机构和位移传感器,并获得集成位移传感器的纳米级精度的微运动装置。特别是,本研究的重点是基于集成电路的微加工的隧道电流单元,这是建立在许多组件现在。获得了以下结果:(1)厚度约为10 μ m的硅膜片被静电弯曲。膜片中心的位移被用作Z方向致动器。用KOH各向异性地蚀刻硅晶片。位移由静电位移传感器测量,并通过反馈回路进行控制。上升时间为1 ms,精度为100 nm。(2)根据能量原理推导出膜片变形的近似计算公式。实验值符合理论曲线。利用该公式可以设计膜片式作动器。(3)一根锋利的钨针固定在隔膜的中心。隔膜被电驱动以维持针和目标之间的差距。差距在1 nm的数量级,并且检测到从1到100 nA的隧穿电流。(4)制作了由多晶硅薄膜制成的静电致动器。致动器将用于在平行于衬底表面的X-Y平面中驱动靶。一种致动器具有梳状结构,其具有重叠的齿作为静电驱动器。另一个有平行板致动器连接在两个相对端的一个弯曲。这些执行器是静电驱动的。制作了具有4个第二类驱动器的AX-Y工作台。

项目成果

期刊论文数量(26)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
H. Fujita, T. Ikoma: "Numerical Determination of the Electromechanical Field for a Micro Servosystem" Sensors and Actuators. 215-218 (1990)
H. Fujita、T. Ikoma:“微伺服系统机电场的数值确定”传感器和执行器。
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    0
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藤田博之,面高秋人: "2本の円筒電極を持つ静電リニアアクチュエ-タの運動制御" 平成元年電気学会全国大会講演論文集. 697. 137 (1989)
Hiroyuki Fujita、Akito Mentaka:“带有两个圆柱形电极的静电线性致动器的运动控制”日本电气工程师协会 1989 年全国会议记录 697. 137 (1989)。
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    0
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H.Fujita;M.Harada;K.Sato: 1988 IEEE International Workshop on Intelligent Robots and Systems〔IROS'88〕. 15-20 (1988)
H.Fujita;M.Harada;K.Sato:1988 年 IEEE 国际智能机器人和系统研讨会〔IROS88〕。
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    0
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坂田稔,秋澤康善,藤田博之: "静電歳差モ-タ(ESTOM)のマクロモデル" 平成元年電気学会全国大会講演論文集. 738. 193-194 (1989)
Minoru Sakata、Yasuyoshi Akizawa、Hiroyuki Fujita:“静电进动电机(ESTOM)的宏观模型”日本电气工程师学会 1989 年全国会议论文集 738. 193-194 (1989)。
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    0
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Hiroyuki Fujita,Akito Omodaka,他2名: "Variable Gap Electrostatic Actuators" The 8th Sensor Symposium. 145-148 (1989)
Hiroyuki Fujita、Akito Omodaka 和另外 2 人:“可变间隙静电执行器”第 8 届传感器研讨会 145-148 (1989)。
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FUJITA Hiroyuki其他文献

FUJITA Hiroyuki的其他文献

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{{ truncateString('FUJITA Hiroyuki', 18)}}的其他基金

Development of MEMS Experimental System for in-situ TEM Measurement of mechanical and Thermal Properties in Nano-scale
开发用于纳米级机械和热性能原位 TEM 测量的 MEMS 实验系统
  • 批准号:
    17H01049
  • 财政年份:
    2017
  • 资助金额:
    $ 5.18万
  • 项目类别:
    Grant-in-Aid for Scientific Research (A)
Nano Mechanical Characterization Method by MEMS Devices and In-situ TEM Observation and its Applications
MEMS器件纳米力学表征方法和原位TEM观察及其应用
  • 批准号:
    21000008
  • 财政年份:
    2009
  • 资助金额:
    $ 5.18万
  • 项目类别:
    Grant-in-Aid for Specially Promoted Research
Nano Hand-Eye System for Simultaneous Imaging and Characterization of Nano Objects
用于纳米物体同步成像和表征的纳米手眼系统
  • 批准号:
    16101004
  • 财政年份:
    2004
  • 资助金额:
    $ 5.18万
  • 项目类别:
    Grant-in-Aid for Scientific Research (S)
Sensing system based on highly-functional cells on environmentally controlled microchips
基于环境控制微芯片上的高功能细胞的传感系统
  • 批准号:
    13124204
  • 财政年份:
    2001
  • 资助金额:
    $ 5.18万
  • 项目类别:
    Grant-in-Aid for Scientific Research on Priority Areas
Micromachined Optical Matrix Switch for WDM Optical Communication Networks
用于 WDM 光通信网络的微机械光矩阵开关
  • 批准号:
    12555070
  • 财政年份:
    2000
  • 资助金额:
    $ 5.18万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B)
Micromachined Capillary Arrays for DNA Injection
用于 DNA 注射的微机械毛细管阵列
  • 批准号:
    11450100
  • 财政年份:
    1999
  • 资助金额:
    $ 5.18万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B).
Biologically-Inspired Machines Composed of Many Integrated Micromachines
由许多集成微型机器组成的仿生机器
  • 批准号:
    09450104
  • 财政年份:
    1997
  • 资助金额:
    $ 5.18万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B)
A Micromachined and Integrated Tunneling Control Unit and Its Application
微机械一体化隧道控制装置及其应用
  • 批准号:
    07455042
  • 财政年份:
    1995
  • 资助金额:
    $ 5.18万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B)
Development of an optical beam manipulator based on micromachine technologies
基于微机械技术的光束操纵器的研制
  • 批准号:
    06555018
  • 财政年份:
    1994
  • 资助金额:
    $ 5.18万
  • 项目类别:
    Grant-in-Aid for Developmental Scientific Research (B)
Microactuators Integrated with Force Transmission Mechanisms which are Suitable in Microscopic Scales
与适用于微观尺度的力传输机构集成的微执行器
  • 批准号:
    04452161
  • 财政年份:
    1992
  • 资助金额:
    $ 5.18万
  • 项目类别:
    Grant-in-Aid for General Scientific Research (B)

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