Development of Multichannel Spectroscopic and Macroscopic Ellipsometer

多通道光谱宏观椭偏仪的研制

• 批准号: 07555510
• 负责人: SUGIMOTO Katsuhisa
• 金额: $ 0.64万
• 依托单位: TOHOKU UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 1995
• 资助国家: 日本
• 起止时间: 1995 至 1996
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07555510/
• 关键词: Ellipsometry; Microscopic ellipsometer; Spectroscopic ellipsometer; CCD multichannel analyzer; Passive film; Film thickness; Optical constant; 光学定数スペクトル; CCD; マルチチャンネルアナライザ; 瞬間分光

An ellipsometer equipped with a two-dimensional CCD image sensor as a optical detector has been built specifically. This ellipsometer can provide both spectroscopic and microscopic analysis of thin surface films. The passive films on carbon steels and stainless steels have been analyzed in situ by using the newly designed ellipsometer. The results are summarized as follows :1. An ellipsometer consisting of a white light source (Xe lamp), a collimator, a rotating polarizer, a scanning sample stage, a fixed analyzer, an image expander, a spectrometer, a CCD image sensor, and a CCD controller has been designed and constructed.2. A series of calibration was carried out to eliminate systematic errors of the optical system, after which the performance of the ellipsometer was evaluated ; the minimum acquisition time of one spectrum over the wavelength range of 400 to 800nm is 10ms, the standard deviation of ellipsometric parameters is less than 0.1 degrees, and the spatial resolution is 25mum.3. Degradation processes of passive films on 18Cr-8Ni steels in 0.1M-NaCl was examined. The changes in the optical spectrum for CVD-Fe_2O_3-Cr_2O_3 films during dissolution were measured to discuss the results obtained on real passive films. It was found that the change in spatial distribution of film thickness is significant during the initiation process of pitting.4. Spatial distribution of film thickness and optical constants of passive films on a carbon steel (0.12%C) was measured. A model analysis on pure Fe (ferrite) and Fe_3C (pearlite constituent) provided a good information on the difference in optical constants between the films on ferrite and pearlite structures.

专门研制了一台以二维CCD图像传感器为光学探测器的椭偏仪。这种椭偏仪可以提供对薄膜表面的光谱和显微分析。利用新设计的椭偏仪对碳钢和不锈钢表面的钝化膜进行了原位分析。主要研究成果如下：1.设计并制作了一台由白光光源(氙灯)、准直器、旋转偏振器、扫描样品台、固定分析器、图像扩展器、光谱仪、CCD图像传感器和CCD控制器组成的椭偏仪。为了消除光学系统的系统误差，进行了一系列的定标，并对椭偏仪的性能进行了评估，在400~800 nm的波长范围内，一次光谱的最小采集时间为10ms，椭圆偏振参数的标准偏差小于0.1度，空间分辨率为25um。研究了18Cr8Ni钢在0.1M氯化钠溶液中钝化膜的降解过程。测量了CVD-Fe_2O_3-Cr_2O_3薄膜在溶解过程中光谱的变化，对实际钝化薄膜的结果进行了讨论。研究发现，在点蚀起始过程中，薄膜厚度的空间分布发生了显著的变化。测量了碳钢(0.12%C)钝化膜厚度和光学常数的空间分布。对纯Fe(铁素体)和Fe_3C(珠光体成分)的模型分析很好地解释了铁素体和珠光体结构上薄膜光学常数的差异。

项目成果

Nobuyoshi Hara: "Analysis of Thin Surface Films by Spectroscopic Ellipsometry" Materia. 36 (in press). (1997)

Nobuyoshi Hara：“通过椭圆偏振光谱法分析薄膜”材料。

土屋 彰: "模擬ベントナイト接触水中における炭素鋼とその構成相の不働態化特性" 材料と環境. 45・4. 217-225 (1996)

Akira Tsuchiya：“碳钢及其组成相在模拟膨润土接触水中的钝化性能”材料与环境45・4（1996）。

原 信義: "分光エリプソメトリーによる表面薄膜解析" まてりあ. 36(印刷中). (1997)

Nobuyoshi Hara：“使用光谱椭圆光度法进行表面薄膜分析”Materia 36（出版中）。

土屋 彰: "模擬ベントナイト接触水中における炭素鋼とその構成相の不働態化特性" 材料と環境. 45. 217-225 (1996)

Akira Tsuchiya：“碳钢及其组成相在模拟膨润土接触水中的钝化性能”材料与环境，45. 217-225 (1996)。

AKira Tsuchiya: "Passivation Characteristics of Carbon Steels and Their Constituent Pahses in Water which in Contact with Bentonite" Zairyo-to-Kankyo. 45. 217-225 (1996)

AKira Tsuchiya：“碳钢及其成分在与膨润土接触的水中的钝化特性”Zairyo-to-Kankyo。