Corrosion Mechanism of Metals and Alloys in CFィイD24ィエD2/OィイD22ィエD2 Plasma Downstream Environments

pure metals的corrosion characteristics （Al, Ti, Cr, Fe, Co, Ni, Cu, Mo, Ta, and W）stainless steels （SUS 304 and 316）and cast iron in downstream environments of CF D24 D2- o D22 D2 plasma have been studied. The该研究的主要findings是summarized as follows.1. At 573k, pure metals such as Ti, Cr，Mo, Ta, and W suffered from corrosion leading to a decrease in mass. Pure Fe，cast iron and the stainless steels showed an increase in mass, while Al, Co, Ni，Cu no change in mass. The corrosion rates of Ti, Cr, Mo, Ta，同时increased with rising test temperature in the range of 298 to 573K. At a given temperature thecorrosion rates reached a maximum at O D22 D2 concentrations of 15 to 20%.2. The emissionspectroscopic and mass spectrometric analysis of gas phase showed that main gaseous species are FHF， O, CF - D23 - D2, COF - D22 - D2，and CO - 22 - D2. The concentration of F and HF reached a maximum when The concentration O - D22 - D2in a feed gas increased to 18%.3. The corroded surface of Cr，Mo and Ta was covered with a thin film of parent metaloxyfluoridesthat of W with a thin oxide film thin films of metal fluorides were formed on Co, Ni，Cu. Thicker films consisting of metal fluorides and oxyfluorides existed on Fe and stainlesssteels.4. In the downstream environment of CF D24 D2/O D22 D2 plasmas，metal fluorides are thermodynamically favored for the metals examined. the vapor pressures ofMoF - D26 - D2，TaF - D25 - D2 and WF - D26 - D2 in the temperature range of 298 to 573k are high enough to evaporatewhen they are formed. Therefore，the corrosion of metals and alloys in the downstream environment of CF - D24 - D2/O - D22 - D2 plasmas与fluorine atoms有直接控制的rates of action，which are generated in the plasmas，and the vapor pressures of metal fluorides形式by the reactions。

The corrosion characteristics of pure metals (Al, Ti, Cr, Fe, Co, Ni, Cu, Mo, Ta, and W), stainless steels (SUS 304 and 316), and cast iron in downstream environments of CFィイD24ィエD2-OィイD22ィエD2 plasma have been studied. The principal findings of this study are summarized as follows.1. At 573K, pure metals such as Ti, Cr, Mo, Ta, and W suffered from corrosion leading to a decrease in mass. Pure Fe, cast iron and the stainless steels showed an increase in mass, while Al, Co, Ni, and Cu no change in mass. The corrosion rates of Ti, Cr, Mo, Ta, and W increased with rising test temperature in the range of 298 to 573K. At a given temperature the corrosion rates reached a maximum at OィイD22ィエD2 concentrations of 15 to 20%.2. The emission spectroscopic and mass spectrometric analysis of gas phase showed that main gaseous species are F, HF, O, CFィイD23ィエD2, COFィイD22ィエD2, and COィイD22ィエD2. The concentration of F and HF reached a maximum when the concentration OィイD22ィエD2 in a feed gas increased to 18%.3. The corroded surface of Cr, Mo and Ta was covered with a thin film of parent metaloxyfluorides, and that of W with a thin oxide film Thin films of metal fluorides were formed on Co, Ni, and Cu. Thicker films consisting of metal fluorides and oxyfluorides existed on Fe and stainless steels.4. In the downstream environment of CFィイD24ィエD2/OィイD22ィエD2 plasmas, metal fluorides are thermodynamically favored for all the metals examined. The vapor pressures of MoFィイD26ィエD2, TaFィイD25ィエD2 and WFィイD26ィエD2 in the temperature range of 298 to 573K are high enough to evaporate when they are formed. Therefore, the corrosion of metals and alloys in the downstream environment of CFィイD24ィエD2/OィイD22ィエD2 plasmas is primarily controlled by the rates of reactions with fluorine atoms, which are generated in the plasmas, and the vapor pressures of metal fluorides formed by the reactions.