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Corrosion Mechanism of Metals and Alloys in CFィイD24ィエD2/OィイD22ィエD2 Plasma Downstream Environments

CF D24 D2/O D22 D2 等离子体下游环境中金属和合金的腐蚀机理

基本信息

批准号：
09450264
负责人：
SUGIMOTO Katsuhisa
金额：
$ 10.37万
依托单位：
TOHOKU UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
1997
资助国家：
日本
起止时间：
1997 至 1999
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-09450264/
关键词：
Plasma etching Reactive ion etching Plasma downstream corrosion Corrosion rate Gas phase analysis Surface analysis Fluoride Vapor pressure 酸化物

项目摘要

The corrosion characteristics of pure metals (Al, Ti, Cr, Fe, Co, Ni, Cu, Mo, Ta, and W), stainless steels (SUS 304 and 316), and cast iron in downstream environments of CFィイD24ィエD2-OィイD22ィエD2 plasma have been studied. The principal findings of this study are summarized as follows.1. At 573K, pure metals such as Ti, Cr, Mo, Ta, and W suffered from corrosion leading to a decrease in mass. Pure Fe, cast iron and the stainless steels showed an increase in mass, while Al, Co, Ni, and Cu no change in mass. The corrosion rates of Ti, Cr, Mo, Ta, and W increased with rising test temperature in the range of 298 to 573K. At a given temperature the corrosion rates reached a maximum at OィイD22ィエD2 concentrations of 15 to 20%.2. The emission spectroscopic and mass spectrometric analysis of gas phase showed that main gaseous species are F, HF, O, CFィイD23ィエD2, COFィイD22ィエD2, and COィイD22ィエD2. The concentration of F and HF reached a maximum when the concentration OィイD22ィエD2 in a feed gas increased to 18%.3. The corroded surface of Cr, Mo and Ta was covered with a thin film of parent metaloxyfluorides, and that of W with a thin oxide film Thin films of metal fluorides were formed on Co, Ni, and Cu. Thicker films consisting of metal fluorides and oxyfluorides existed on Fe and stainless steels.4. In the downstream environment of CFィイD24ィエD2/OィイD22ィエD2 plasmas, metal fluorides are thermodynamically favored for all the metals examined. The vapor pressures of MoFィイD26ィエD2, TaFィイD25ィエD2 and WFィイD26ィエD2 in the temperature range of 298 to 573K are high enough to evaporate when they are formed. Therefore, the corrosion of metals and alloys in the downstream environment of CFィイD24ィエD2/OィイD22ィエD2 plasmas is primarily controlled by the rates of reactions with fluorine atoms, which are generated in the plasmas, and the vapor pressures of metal fluorides formed by the reactions.

研究了纯金属（Al、Ti、Cr、Fe、Co、Ni、Cu、Mo、Ta和W）、不锈钢（SUS 304和316）和铸铁在CF_（12）D_24_（12）D_2-O_（12）D_22_（12）D_2等离子体下游环境中的腐蚀特性。本研究的主要发现归纳如下：1.在573 K下，纯金属如Ti、Cr、Mo、Ta和W遭受腐蚀，导致质量减少。纯铁、铸铁和不锈钢的质量增加，而Al、Co、Ni和Cu的质量没有变化。在298 ~ 573 K范围内，Ti、Cr、Mo、Ta和W的腐蚀速率随试验温度的升高而增大。在给定的温度下，腐蚀速率在O_（22）O_（22）浓度为15%至20%时达到最大值。气相的发射光谱和质谱分析表明，主要的气体物种是F，HF，O，CF二氢呋喃D23二氢呋喃D2，COF二氢呋喃D22二氢呋喃D2和CO二氢呋喃D22二氢呋喃D2。当原料气中O ↓ [2] D22 ↓ [3] D2的浓度增加到18%时，F和HF的浓度达到最大值。Cr、Mo和Ta的腐蚀表面覆盖着一层母体金属氟氧化物薄膜，W的腐蚀表面覆盖着一层氧化物薄膜，Co、Ni和Cu的腐蚀表面形成金属氟化物薄膜。Fe和不锈钢表面上存在较厚的由金属氟化物和氟氧化物组成的膜.在CF-12 D24 - 12 D2/O-12 D22 - 12 D2等离子体的下游环境中，金属氟化物对所有检测的金属都是有利的。在298 ~ 573 K温度范围内，MoF_（26）Al_（25）Al_因此，金属和合金在CF 12 D24 12 D2/O 12 D22 12 D2等离子体的下游环境中的腐蚀主要由与等离子体中产生的氟原子的反应速率以及由反应形成的金属氟化物的蒸气压控制。