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Study on Optimization of Barrier Discharge Excimer-Lamp

势垒放电准分子灯的优化研究

基本信息

批准号：
07558175
负责人：
SAKAI Yosuke
金额：
$ 1.15万
依托单位：
HOKKAIDO UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A)
财政年份：
1995
资助国家：
日本
起止时间：
1995 至 1996
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07558175/
关键词：
excimer lamp vacuum-ultra-violet-light modeling laser-spectroscopy non-equilibrium plasma

项目摘要

In order to improve the capability of of Xe gas excimer lamps from which vacuum ultra-violet light is obtained, the characteristics and filamentation of barrier discharge plasma, and the factors which determine the light intensity and efficiency have been investigated. The main results obtained in this work are as follows.1) In aXe gas barrier plasma, the magnitude of charge concentration accumulated on the surface of barriers increased with decreasing the frequencies of power source, and the production rate of excimers increased with decreasing the rise-time of the pulse voltage applied to plasma. Filamentation which might occur by non-uniformity in a uniform volume discharges was found to be initiated by a local gas temperature rise in excimer laser discharges.2) In order to understand a relation between the laser spectroscopic signals and the plasma properties in non-equilibrium plasmas, the photon concentrations which are used for the laser diagnostics did not appreciably disturb the electron energy distribution but significantly changes the concentration of local excited levels.3) In Xe/Ne mixtures, the laser absorption and opt-galvanic signals showed that the concentration of the metastable Xe was largest in the vicinity of the cathode under DC discharge. In the case of LF (10kHz-500kHz) discharges, the concentration had two peaks in the vicinity of the ground and powered electrodes.As a conclusion it was suggested that an optimum design of excimer lamps was to utilize the sheath regions where the electron temperature was high enough to obtain a high value of excimer production rate.

为了提高Xe气体准分子灯获得真空紫外光的能力，研究了势垒放电等离子体的特性和成丝，以及决定光强和效率的因素。主要研究结果如下：1)在AXE气体阻挡等离子体中，随着电源频率的降低，势垒表面积累的电荷浓度增大，准分子产生率随等离子体脉冲电压上升时间的减小而增大。2)为了了解激光光谱信号与非平衡等离子体中等离子体性质之间的关系，用于激光诊断的光子浓度对电子能量分布没有明显的干扰，但显著改变了局域激发能级的浓度。3)在Xe/Ne混合物中，激光吸收和光电信号表明，直流放电下阴极附近的亚稳态Xe的浓度最大。在低频(10 kHz~500 kHz)放电情况下，准分子灯在地电极和电源电极附近有两个浓度峰值，因此，最佳的准分子灯设计是利用电子温度足够高的鞘区域来获得较高的准分子产生率。