Study on development of electrodeposited diamond wire tool which ensures high machining efficiency and longer life of tool

本应用研究旨在开发一种既能保证高加工性能，又能使刀具寿命更长的新型电沉积金刚石线材刀具。为了能够达到这些目的，(1)在钢琴丝(phi0.2 mm)上电沉积螺旋金刚石颗粒的螺旋线工具；(2)在由两根钢琴丝(phi0.1 mm)组成的绞线上均匀地电沉积金刚石颗粒的扭线工具。此外，还对这些新型线切割工具进行了试制，并对其强度特性和加工性能进行了实验研究。从断裂载荷强度特性的结果看，螺旋钢丝具与常规钢丝具相当，…的横截面面积减小约50%，与常规钢丝具相比有减小的趋势更多的是工具。但是，由于钢丝绳直径的减小，材料强度的提高，这一降低率约为30%。2.从新型线材刀具的扭转强度特性来看，螺旋线材和扭线工具都比传统线材工具提高了约3倍。3.从新线材工具的加工效率来看，螺旋线材工具和扭线工具分别比传统线材工具最大提高了约1.8倍和2倍。此外，新型线切割刀具由于在每个线切割刀具上形成了螺旋形切屑凹槽，改善了工作液的流入效应和切屑的去除效果。4.与传统线切割刀具相比，扭曲线切割刀具的刀具寿命有了显著的提高。5.从新型线切割刀具对切边和硅片粗糙度的加工精度来看，螺旋线切割刀具与传统线切割刀具相比，表现出轻微的劣化。然而，可以清楚地看到，即使绞线刀具的加工效率显著提高，其加工精度也呈现出与传统线切割刀具相当的程度。较少

This application study aims to develop the new electrodeposited diamond wire tool which ensures high machining performance and makes a longer life of tool. In order to be able to achieve these purpose, (1) the spiral wire tool which is electrodeposited spiral diamond grains on a piano wire (phi0.2mm), and (2) the twisted wire tool which is electrodeposited diamond grains uniformly on the twisted wire consisted of two piano wires (phi0.1mm) are developed. In addition, these new wire tools are not only produced by way of trial but also examined on both the strength characteristics and the machining performance experimentally. The following points have been noted.1.From the results on the strength characteristics for breaking load of the new wire tools, the spiral wire tool is equal to the conventional wire tool used a phi0.2mm piano wire, and the twisted wire tool tends to decrease to be compared with the conventional wire tool owing to decrease of about 50% in the cross section area of … More the tool. However, this decrease ratio is about 30% because of the improvement of material strength due to decrease of a piano wire diameter.2.From the results on the twisted strength characteristics of the new wire tools, both spiral and twisted wire tools improve approximately 3 times of the conventional wire tool.3.From the results on the machining efficiency by the new wire tools, each of the spiral wire tool and the twisted wire tool shows improvement of aproximately 1.8 and 2 times in maximum of the conventional wire tool. Furthermore, it is clear that the new wire tools have improved the in-outflow effect of the working fluid and the eliminating effect of cutting chips owing to the spiral chip-pocket formed on an each wire tool.4.Twisted wire tool shows a remarkable improvement in the tool life compared with the conventional wire tool.5.From the results on the machining accuracy of edge chipping and wafer roughness by the new wire tools, the spiral wire tool shows a little deterioration compared with the conventional wire tool. However, it is clear that the machining accuracy by the twisted wire tool is presented an equal quantity with the conventional wire tool even though the machining efficiency by the twisted wire tool improver remarkably. Less