Fabrication of Photonic Crystals with Spatial Phase Control Regions and their applications to Optical Devices

具有空间相位控制区域的光子晶体对于实现自发发射控制激光二极管或无损紧凑波导等未来新概念光学器件非常重要。本工作的目的是制备具有空间相位控制区的光子晶体及其在光学器件中的应用。首先，我们利用光子带隙位于微波区的SiNx球制备了三维pc。我们在SiNx 3d - pc中插入了空间相位控制区域，并观察了局部光学模式。我们还在pc中制造了量子阱（QW）结构，并通过与理论计算的对比观察了量子阱效应。然后，我们首次使用选择性区域晶体生长技术制备了含有GaN晶体的二维光子晶体（2D）。利用微操作方法，将二维图案化薄板叠加而成三维光子晶体。通过20层薄图案板的叠加，实现了木桩结构的三维光子晶体。在3.3 ~ 4.3μm波长附近存在光子带隙。我们还通过在三维晶体中引入缺陷区域来观察局部光学模式。

Photonic crystals (PCs) with some spatial phase control regions are very important to achieve future new-concept optical devices such as spontaneous emission controlled laser diodes or loss-less compact waveguides. The purpose of this work is to fabricate photonic crystals with spatial phase control regions and their applications to optical devices. Firstly, we fabricated 3-dimensional (3D) PCs by using SiNx spheres of which photonic bandgap is in microwave region. We inserted spatial phase control regions in the SiNx 3D-PCs and observed localized optical modes. We also fabricated quantum well (QW) structures in PCs and observed QW effects by comparing with theoretical calculations. Then we fabricated 2-dimensiopnal (2D) PCs with GaN crystals, for the first time, by using selective area crystal growth techniques. Three dimensional (3D) photonic crystals was fabricated by stacking 2D patterned thin plats by using micro manipulation method. We achieved wood-pile structure 3D photonic crystal by stacking 20-layer thin patterned plates. Photonic bandgap was observed in the wavelength around 3.3-4.3μm. We also observed the localized optical mode by introducing defect area in the 3D crystal.