Fabrication of Photonic Crystals with Spatial Phase Control Regions and their applications to Optical Devices

具有空间相位控制区的光子晶体对于实现未来的新概念光学器件如自发辐射控制的激光二极管或无损耗的紧凑型光波导具有重要意义。本工作的目的是制备具有空间相位控制区的光子晶体及其在光学器件中的应用。首先，我们利用光子带隙在微波区的氮化硅球制备了三维光子晶体。我们在SiNx 3D-PC中插入空间相位控制区域，并观察到局域光学模式。我们还在PC中制备了量子阱结构，并通过与理论计算的比较观察到了量子阱效应。在此基础上，我们首次采用选区晶体生长技术制备了GaN基二维光子晶体。采用微操作方法，通过二维图案化的平板堆叠，制备了三维光子晶体。我们通过堆叠20层图案化薄板，得到了木堆结构的三维光子晶体。在3.3-4.3μm波长范围内观察到光子带隙。通过在三维晶体中引入缺陷区，我们还观察到了局域光模。

Photonic crystals (PCs) with some spatial phase control regions are very important to achieve future new-concept optical devices such as spontaneous emission controlled laser diodes or loss-less compact waveguides. The purpose of this work is to fabricate photonic crystals with spatial phase control regions and their applications to optical devices. Firstly, we fabricated 3-dimensional (3D) PCs by using SiNx spheres of which photonic bandgap is in microwave region. We inserted spatial phase control regions in the SiNx 3D-PCs and observed localized optical modes. We also fabricated quantum well (QW) structures in PCs and observed QW effects by comparing with theoretical calculations. Then we fabricated 2-dimensiopnal (2D) PCs with GaN crystals, for the first time, by using selective area crystal growth techniques. Three dimensional (3D) photonic crystals was fabricated by stacking 2D patterned thin plats by using micro manipulation method. We achieved wood-pile structure 3D photonic crystal by stacking 20-layer thin patterned plates. Photonic bandgap was observed in the wavelength around 3.3-4.3μm. We also observed the localized optical mode by introducing defect area in the 3D crystal.