Fabrication of Photonic Crystals with Spatial Phase Control Regions and their applications to Optical Devices

具有一定空间位相控制区域的光子晶体对于实现未来的新概念光学器件，如自发辐射控制的激光二极管或无损耗的紧凑型光波导具有重要的意义。本工作的目的是制备具有空间位相控制区的光子晶体及其在光学器件中的应用。首先，我们利用光子带隙位于微波区的SiNx球体制备了三维(3D)PC。我们在SINX 3D-PC中插入了空间位相控制区，观察到了局域光学模式。我们还在光子晶体中制备了量子阱(QW)结构，并通过与理论计算的比较观察到了QW效应。然后，我们利用选区晶体生长技术首次在GaN晶体中制备了二维(2D)PC。采用微操作方法，将二维图案化的薄板堆积起来，形成三维光子晶体。通过叠加20层图案板，实现了木堆结构的三维光子晶体。在3·3-4·3μm的波长范围内观察到了光子带隙，并通过在3D晶体中引入缺陷区观察到了局域光学模式。

Photonic crystals (PCs) with some spatial phase control regions are very important to achieve future new-concept optical devices such as spontaneous emission controlled laser diodes or loss-less compact waveguides. The purpose of this work is to fabricate photonic crystals with spatial phase control regions and their applications to optical devices. Firstly, we fabricated 3-dimensional (3D) PCs by using SiNx spheres of which photonic bandgap is in microwave region. We inserted spatial phase control regions in the SiNx 3D-PCs and observed localized optical modes. We also fabricated quantum well (QW) structures in PCs and observed QW effects by comparing with theoretical calculations. Then we fabricated 2-dimensiopnal (2D) PCs with GaN crystals, for the first time, by using selective area crystal growth techniques. Three dimensional (3D) photonic crystals was fabricated by stacking 2D patterned thin plats by using micro manipulation method. We achieved wood-pile structure 3D photonic crystal by stacking 20-layer thin patterned plates. Photonic bandgap was observed in the wavelength around 3.3-4.3μm. We also observed the localized optical mode by introducing defect area in the 3D crystal.