Hierarchical modeling of large and complex systems for control

本研究将系统辨识与物理建模相结合，探讨控制系统设计的建模方法。作为建模实例，处理了声传输系统、半导体曝光设备和鼓风炉。主动噪声控制的声传输系统建模：为了设计汽车车内噪声主动控制系统，采用物理建模和系统辨识相结合的方法对汽车车内声传输系统进行建模.半导体曝光装置的多变量建模：采用基于子空间的系统辨识方法对半导体曝光装置的多自由度动力学特性进行建模。说明了基于子空间的系统辨识方法对于多变量系统建模是有效的.基于高炉仿真器辨识的控制系统设计：提出了一种利用仿真器对高炉等复杂系统进行建模，以便于控制器设计的方法。

This research studies a modeling methodology for control systems design, in which system identification is combined with physical modeling. As modeling examples, an acoustic transmission system, a semiconductor exposure apparatus, and a blast furnace are treated.1. Modeling of acoustic transmission system for active noise control : In order to design an active noise control system for an automobile interior noise, the acoustic transmission system inside automobile is modeled by combined physical modeling and system identification method.2. Multivariable modeling of a semiconductor exposure apparatus : A multi-degree-of-freedom dynamical characteristics of a semiconductor exposure apparatus is modeled by subspace-based system identification method. It is clarified that the subspace-based system identification method is efficient for modeling of multivariable systems.3. Control systems design based on identification of the simulator for blast furnace : A method to give models of complex systems, for example a blast furnace, for controller design by using simulators is proposed.