Active emitting 3D Photonic Crystals prepared by direct wafer bonding

通过直接晶圆键合制备有源发射 3D 光子晶体

• 批准号: 5318398
• 负责人: Professorin Dr. Margit Zacharias
• 金额: --
• 依托单位: Institut für Mikrosystemtechnik (IMTEK)
• 依托单位国家: 德国
• 项目类别: Priority Programmes
• 财政年份: 2001
• 资助国家: 德国
• 起止时间: 2000-12-31 至 2005-12-31
• 项目状态: 已结题
• 来源: https://gepris.dfg.de/gepris/projekt/5318398?language=en
• 关键词: Active; emitting; 3D; Photonic; Crystals

Periodic dielectric structures have the ability to affect the density of electro-magnetic states within their boundaries and suppress all modes for a range of frequencies partially or completely. In the proposed project we will produce 3-dimensional photonic crystals by combining deep UV lithography, electron beam writing techniques and direct wafer bonding for preparation of so-called wood pile structures using the high dielectric contrast of a Si/air structure. In this way, we will design a structure with a complete band gap in all three directions for the desired wavelength of 1.54 µm. Line structures based on single crystalline Si will be prepared using reactive plasma etching. Then, these structures will be face to face bonded in cross orientation using the method of direct wafer bonding. Afterwards, the Si substrate will be removed leaving the sub micrometer grid structure untouched. In this way the three dimensional structure will be developed layer by layer. The implementation of defects as well as active emitting sources are planed to demonstrate the active and passive waveguide properties of the structure. The optical characterization of the structures will be done by spectroscopic methods. Partly this will be realized using the possibilities established in the Photonic Crystal program.

周期性介质结构能够影响其边界内的电磁态密度，并部分或完全抑制某一频率范围内的所有模式。在拟议的项目中，我们将通过结合深紫外光刻、电子束写入技术和直接晶片键合来制造三维光子晶体，以利用硅/空气结构的高介电对比度来制备所谓的木堆结构。通过这种方法，我们将设计一种在所有三个方向上都具有完全禁带的结构，所需的波长为1.54微米。基于单晶硅的线结构将使用反应等离子体刻蚀来制备。然后，这些结构将使用直接晶片键合的方法进行面对面交叉定向键合。然后，硅衬底将被移除，亚微米栅格结构保持不变。这样，三维结构就会层层展开。设计了缺陷和有源发射源的实现，以演示该结构的有源和无源波导特性。这些结构的光学表征将通过光谱方法来完成。这在一定程度上将通过使用光子晶体计划中建立的可能性来实现。