Control of hydrogen content in the carbon nitride materials and its development to the field emission devices based on the high-resolution laser spectroscopy

氮化碳材料中氢含量的控制及其基于高分辨率激光光谱的场发射器件的开发

基本信息

批准号：
14550721
负责人：
ITO Haruhiko
金额：
$ 2.62万
依托单位：
Nagaoka University of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2002
资助国家：
日本
起止时间：
2002 至 2004
项目状态：
已结题

项目摘要

The present study aims to optimize the electric-field-emission property of hydrogenated amorphous carbon nitrides (a-CN_x : H) by controlling the quantity of the hydrogen atoms contained. Carbon nitrides including negligible amount of hydrogen atoms have a property of mechanical hardness. On the other hand, those include hydrogen atoms are, in general, mechanically soft : they have excellent electric-field emission characteristic when the hydrogen atoms are included in the forms of the NH or OH groups. In particular, the hybridized material which consists of the electrically-conducting Al-doped ZnO single-crystal whiskers (Fig.1) coated by the a-CN_x : H or a-CN_x : O : H thin films has a possibility of the FED device. In addition, a-CN_x : H materials containing CH_n(n=1-3) groups have the hydrogen-storage characteristic. Therefore, the control of the hydrogen quantity in the a-CN_x : H or a-CN_x : O : H materials is the key technology to synthesize the materials having the physical p … More roperties hoped.In the present study, carbon nitrides are synthesized by using the plasma enhanced CVD processes by applying the decomposition of cyanides such as BrCN and CH_3CN with the microwave or ECR plasmas of rare gases. In 2004, following studies are made. (1)The decomposition process of BrCN by the microwave-discharged products of Ar and the formation and quenching processes of the precursor CN radicals were investigated based on the laser-induced fluorescence (LIF) spectroscopy and the electrostatic-probe method. The dominant process of decomposition of BrCN is the charge transfer from Ar^+ followed by the BrCN^+-e^-recombination. The dominant quenching process of CN radicals is the reaction with unreacted BrCN. (2)The sticking probability (s) of the CN radicals onto the a-CN_x : H film was determined from the LIF spectroscopy of CN radicals, flow speed, and the weight of the a-CN_x : H film deposited. The s value is in the range of 0.032-0.019 being negatively dependent on the pressure of Ar in the range of 0.3-0.7 Torr. This negative pressure dependence of s can be explained by the reactivity of the CN radicals on the film surface. (3)ECR plasma CVD of the mixed gases of He and BrCN was found to be effective for the synthesis of a-CN_x : O : H with the hydrogen amount in a controlled fashion. Less

本研究旨在通过控制所含氢原子的数量来优化氢化非晶碳（A-CN_X：H）的电场发射特性。硝酸盐包括可忽略的氢原子具有机械硬度的特性。另一方面，这些包含氢原子通常在机械上是柔软的：当NH或OH组的形式中包括氢原子时，它们具有出色的电场发射特性。特别是，由a-cn_x：h或a-cn_x：o：o：h薄膜覆盖的电导通的ZnO单晶晶须的杂交材料（图1）具有FED设备。此外，含有CH_N（n = 1-3）组的A-CN_X：H材料具有氢有特性。因此，控制A-CN_X：H或A-CN_X：O：H材料中氢数量的控制是合成具有物理P的材料的关键技术。在本研究中，使用少量的CVD过程来合成二硝基含量的碳氮，从而通过少数cvd或cyrs of brcns ofermas和ch_3 contos ofermas和cyrs ofermas contof ofermas和ch_3 contos ofermas和ch_3333333333。气体。 2004年，进行了研究。（1）根据激光诱导的荧光（LIF）光谱和静电探针法，研究了AR的微波二递送产物的BRCN分解过程，并研究了前体CN自由基的形成和淬火过程。 BRCN分解的主要过程是从Ar^+的电荷转移，然后是BRCN^+ -E^ - 归化过程。 CN自由基的主要淬灭过程是与未反应的BRCN的反应。（2）CN自由基在A-CN_X：H膜上的粘附概率是根据CN自由基，流速和A-CN_X的重量的LIF光谱确定的。 S值在0.032-0.019的范围内负依赖于AR在0.3-0.7 TORR范围内的压力。 S的负压依赖性可以通过CN自由基在膜表面的反应性来解释。（3）发现HE和BRCN的混合气体的ECR等离子体CVD可有效以受控的方式与氢量合成a-cn_x：o：h。较少的

项目成果

期刊论文数量（19）

专著数量（0）

科研奖励数量（0）

会议论文数量（0）

专利数量（0）

伊藤治彦, 二木裕史, 並木恵一, 伊藤典子, 斎藤秀俊: "Hydrogenated Amorphous Carbon Nitride Films Formed from the Dissociative Excitation Reaction of CH_3CN with the Microwave-Discharge Flow of Ar : Correlation of the [N]/([N]+[C]) Ratio with the Relative Number Densities of th

Haruhiko Ito、Hiroshi Niki、Keiichi Namiki、Noriko Ito、Hidetoshi Saito：“CH_3CN 的解离激发反应与 Ar 微波放电流形成的氢化非晶氮化碳薄膜：[N]/([N] + [C]) 与相对数密度的比率

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伊藤治彦, 三木裕史, 伊藤治彦: "Dependence of the Electronic Transition Moment for the C^3Δ-X_3Δ System of TiO on the Internuclear Distance"Chemical Physics Letters. 370巻. 62-67 (2003)

Haruhiko Ito、Hiroshi Miki、Haruhiko Ito：“TiO 的 C^3Δ-X_3Δ 系统的电子跃迁矩对核间距离的依赖性”化学物理快报 370. 62-67 (2003)。

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Work function of amorphous carbon nitride with various functional groups

DOI：
10.1143/jjap.41.6169
发表时间：
2002-10-01
期刊：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS
影响因子：
0
作者：
Saitoh, H;Akasaka, H;Ito, H
通讯作者：
Ito, H

Hydrogen Storage in Amorphous Phase of Hydrogenated Carbon Nitride

氢化碳氮化物非晶相储氢