Controlling of UV light by using III-nitride based photonic crystals with nano-antenna

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Photonic crystals have the distribution of index which is as same as light wavelength or smaller than light wavelength. Its periodicity is able to control optical constant such as transmission, reflectance and absorption, or polarization. In this research, the fabrication of photonic crystas with III-nitride semiconductors, which is transparent for visible and ultraviolet and studied on light emitting devices or detectors, and the characteristics of transmission, reflectance, absorption and polarization are cleared. Furthermore, the effect of controlling of UV light is confirmed by UV detectors.Under the backgrounds and purposes, we obtained the following results.1. Fabrication of nanotips of GaN and SiO_2 by using reactive ion etching and controlling of visible light2. Fabrication of pyramid structure of Si by using reactive ion etching3. Fabrication of stripe structure of AlN and crystal growth of high quality AlGaN epitaxial layers4. Characterization of GaN and AlGaN UV detectors5. Fabrication of nano order pattern by using electron beam lithography6. Fabrication of gratings on polymer films by using electron beam lithography and plane light emitting of LEDBased on these results, we believe that high performance UV LED and UV detectors with controlling UV light can be realized.