Improvement of sensitivity in high-resolution RBS

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The sensitivity(limit of detection) of high-resolution Rutherford backscattering spectroscopy(HRBS) is mainly determined by the background noise of the spectrometer. There are two major origins of the background noise in HRBS, one is the stray ions scattered from the inner wall of the vacuum chamber of the spectrometer and the other is the dark noise of the detector. A method to reduce the background noise was proposed and the noise was actually reduced by a factor 200. The detection limit can be improved down to 10 ppm for As in Si at a measurement time of one hour under ideal conditions.