Development of MEMS based viscosity sensor

进行了基于MEMS技术的粘度传感器的研制。它能够在传感器芯片上制作传感器的基本结构和应变计。利用研制的夹持器验证了传感器的测量原理，并将夹持器应用于压电致动器。验证的实验结果与标准参照液的校准值相吻合。利用自激振荡器进行的测量理论实验取得了较好的效果。我们申请了八项专利。

The development of viscosity sensor based on the MEMS technology was conducted. It came to be able to produce the basic structure of the sensor and strain gauge on the sensor chip. The measurement principle of the sensor was verified by using a developed holder which is applied the piezo actuator. The experimental results of the verification agreed with the calibration value of the standard reference liquid. The experiment of the measurement theory using the self-oscillation was quite a success. We applied for eight patents.