Clarification of Microwave Absorption Mechanism in Surface Wave Plasma and Optimization of Plasma-Antenna Coupling

本论文以研制用于半导体加工的大面积表面波等离子体源为目标，开展了表面波等离子体微波吸收机理的阐明和等离子体天线耦合优化的研究。主要研究结果如下：1.大面积表面波等离子体的模式识别：首次给出了2.45GHz微波激励下大面积平面表面波等离子体的理论色散关系，并阐明了模式跳跃现象的机理.微波能量的产生机理：我们利用潜望镜技术对高能电子进行了光发射的测量，并研究了微波在电感耦合等离子体中的传播特性。从高能电子产生的实验事实， 关于我们 在石英窗口附近的ced和电场强烈增强的截止层中，我们已经显示了能量吸收过程的可能性，在截止层中，等离子体电子可能被共振增强的微波场加热.等离子体天线耦合的优化：为了研究缝隙结构和位置对等离子体产生效率的影响，我们测试了各种形状的缝隙天线。实验结果表明，等离子体的产生效率取决于缝隙结构，横向缝隙天线（垂直于波导轴切割缝隙）的效果优于其他的上级.波频率对等离子体产生的影响：为了研究波频率对表面波等离子体产生的影响，我们比较了在同一等离子体室中由2.45GHz和915 MHz波产生的SWPs的等离子体特性。在915 MHz波激励下，等离子体密度与入射功率之间具有线性关系.合理的结果：1997-1998年，我们在14个期刊上发表了本研究结果，在国际会议上报告了13篇论文（2篇邀请），在国内学术会议上报告了24篇论文。少

We have been carried out the research associated with the clarification of microwave absorption mechanism and the optimization of plasma-antenna coupling in the surface wave plasma, aiming for the development of large-area surface wave plasma source for semiconductor processing. Main results are listed in the following.1. Mode identification of large-area surface wave plasma : We have for the first time presented the theoretical dispersion relations of the large-area, planar surface wave plasma excited by 2.45 GHz microwaves and have also clarified the mechanism of mode-jump phenomena observed in it.2. Mechanism of the microwave energy : We have carried out the measurements of optical emission using the periscope technique to study high-energy electrons and have investigated the characteristics of microwave propagation in the plasma which was indipendently produced using the RF antenna for inductively-coupled plasma. From the experimental facts that the high-energy electrons were produ … More ced in the vicinity of the quartz window and the electric field was strongly enhanced in the cutoff layer, we have shown the possibility of the energy absorption process in the cutoff layer, where the plasma electrons might be heated by the resonantly enhanced microwave fields.3. Optimization of plasma-antenna coupling : To investigate the effect of the slot structure and position on the plasma production efficiency, we have tested a various shape of slot antennas. Experimental results showed that the plasma production efficiency depended upon the slot structure and the case of transverse slot antennas(slots were cut perpendicularly to the waveguide axis) was superior to others.4. Effect of wave frequency on the plasma production : To study the effect of wave frequency on the surface wave plasma production, we compared the plasma characteristics of SWPs produced by 2.45GHz and 915MHz waves in the same plasma chamber. It is noted that the linear production characteristics between plasma density and incident power was obtained in the case of 915MHz wave excitation.5. Reasearch results : We have published the present results in 14 journal papers and have reported 13 papers in the international conferences (2 invited) and 24 papers in the domestic symposium and meetings in 1997-1998. Less