Development of High-Pressure, High-Density Micorwave Plasma Source and Its Application to Large-area Thin Film Processing

在本研究中，我们致力于研制高密度高压微波等离子体，并将其应用于大面积薄膜加工。主要研究结果如下：(1)微波等离子体装置的放大：组装了直径为60 cm的大面积等离子体装置。利用直径为50 cm的新型内置式微波发射器，进行了大面积等离子体产生实验。在微波发射器的设计和优化中，我们使用场模拟器MAFIA进行了场分析，并展示了如何设计等离子体放大所需的发射器。(2)大面积微波等离子体的产生：我们用Ar或He进行了等离子体产生实验，结果表明，当微波功率为1kW，气压为0.1Torr时，可以产生直径超过40 cm的均匀等离子体。(3)大面积等离子体的应用：作为微波等离子体在等离子体CVD中的应用，我们利用直径40 cm的表面波等离子体在10-15 Torr的表面波等离子体中沉积了碳纳米管。并展示了制造空间均匀的纳米管的可能性。此外，我们还尝试将其应用于医疗设备的灭菌，发现在低温下可以非常快速地对其进行灭菌。(4)高压-微波等离子体的产生：我们利用两个微波在50Torr的高压下开发了新型微波等离子体装置。研究结果总结：本研究结果：发表在期刊上的论文8篇(2篇)，合著2本书，国际会议投稿24篇，国内学术会议口头或海报发表45篇，国家专利申请5项，国外专利1项。申请。

In the present research, we aimed at developing the high-density microwave plasma operated at high pressure and applying it to the large-area thin film processing. Main results are listed in the followings.(1)Enlargement of Microwave Plasma Device : We assembled the large-area plasma device with a diameter of 60 cm. Using a novel internally mounted microwave launcher with a diameter of 50 cm, we performed the experiments of large-area plasma production. In designing and optimizing the microwave launcher, we carried out the field analysis using the field simulator, MAFIA, and showed how to design the launcher required for the plasma enlargement.(2)Production of Large-area Microwave Plasma : We performed the plasma production experiments using Ar or He and showed that we could produced the uniform plasma over 40 cm in diameter when microwave power was 1 kW at pressure of 0.1 Torr..(3)Application of Large-area Plasmas : As applications of microwave plasma to plasma CVD, we carried out the deposition of carbon nanotube using 40cm diameter surface wave plasma at 10-15 Torr, and showed a possibility of producing spatially uniform nanotubes. Furthermore, we tried to apply them to the sterilization of medical equipment and found that one could sterilized them very rapidly at low temperature.(4)Production of High Pressure-Microwave Plasma : We developed the novel microwave plasma device using two microwaves at high pressure of 50 Torr. We demonstrated that it could enlarge the plasma size twice compared with that of conventional CVD devices.(5)Summary of Research Results : Results of the present research were 8 articles (two under sub ission) in Journals, 2 books (as co-authors), 24 contributions of International conferences, 45 oral or poster presentation at domestic academic meeting, 5 national patents application and 1 foreign patent. application.