Development of Micro Handling Mini Robot

微搬运微型机器人的开发

• 批准号: 09555079
• 负责人: TOYAMA Shigeki
• 金额: $ 1.6万
• 依托单位: Tokyo University of Agriculture & Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 1997
• 资助国家: 日本
• 起止时间: 1997 至 1999
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-09555079/
• 关键词: spherical ultrasonic motor; positioning stage; laser light; micro actuator; マイクロモータ; 超音波; 球面モータ

We have developed a micro handling robot in this research. This has a spherical ultrasonic motor with rotational three degree of freedom and a sandwich type of ultrasonic motor. The spherical ultrasonic motor consists of a semispherical rotor made of glass and three ring type stators. We set mirrors in the center of the semispherical rotor and measure the posture, detecting the reflected laser light from them by a PSD devices. The stator has two phases piezoelectric ceramics laminated at the back of it. We can rotate the rotor about arbitrary axis by applying alternating voltages to each ceramics and changing the phase difference and the frequency. In the case of precise positioning, we control the number of elastic wave generated on the surface of the stator. The motor has capability of positioning in the accuracy of 1/1000 degrees and settling in three milli seconds in the movable range of three degrees. Furthermore, we added the sandwich type ultrasonic motor to the link attached to the semi-spherical rotor. Since this motor has two stators holding rotor disk between them, the output torque is twice as high as in the case of one stator.This micro robot has excellent features of positioning accuracy and settling time for biotechnological and medical applications.

我们在这项研究中开发了一种微型搬运机器人。它有旋转三自由度的球形超声波电机和三明治式超声波电机。球形超声波电机由一个玻璃制成的半球形转子和三个环形定子组成。我们在半球形转子的中心设置镜子并测量姿态，通过 PSD 设备检测镜子反射的激光。定子背面层叠有两相压电陶瓷。通过向每个陶瓷施加交流电压并改变相位差和频率，我们可以使转子绕任意轴旋转。在精确定位的情况下，我们控制定子表面产生的弹性波的数量。电机具有1/1000度的定位精度，在3度的移动范围内可在3毫秒内稳定。此外，我们在半球形转子的连杆上添加了三明治型超声波电机。由于该电机有两个定子，其间夹有转子盘，因此输出扭矩是一个定子情况下的两倍。该微型机器人具有定位精度和稳定时间的优异特性，适用于生物技术和医疗应用。

项目成果

E.Purwanto and S.TOYAMA: "Sub-micron level fine alignment system by using the ultrasonic spherical motor"Proc.of Tenth World Congress on TMM. vol.5. 1997-2002 (1999)

E.Purwanto 和 S.TOYAMA：“使用超声波球形电机的亚微米级精细对准系统”第十届世界 TMM 大会论文集。

Takayuki KOSAKA and Shigeki TOYAMA: "Analysis of teeth of ultrasonic motor"Proc. Of the Japan Society for Precision Engineering, Autumn meeting. 574 (1998)

Takayuki KOSAKA 和 Shigeki TOYAMA：“超声波电机齿的分析”Proc.

Hiroyuki SEGAWA and Shigeki YOYAMA: "Development of high accurate positioning stage by ultrasonic motor"Proc. Of the Japan Society for Precision Engineering, Autumn meeting. 476 (1998)

Hiroyuki SEGAWA和Shigeki YOYAMA：“超声波电机高精度定位平台的开发”Proc.

E. Purwanto and S. YOYAMA: "Sub-micron level fine alignment system by using the ultrasonic spherical motor"Proc. Of Tenth World Congress on TMM. Vol. 5. 1997-2002 (1999)

E. Purwanto 和 S. YOYAMA：“使用超声波球形电机的亚微米级精细对准系统”Proc。