Development of an Ultraprecise and Ultrahigh-speed Rotating Mechanism by using a Micro Spherical Ultrasonic Motor

利用微型球形超声波电机开发超精密超高速旋转机构

• 批准号: 12450065
• 负责人: TOYAMA Shigeki
• 金额: $ 2.56万
• 依托单位: Tokyo A&T University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2000
• 资助国家: 日本
• 起止时间: 2000 至 2002
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-12450065/
• 关键词: Ultrasonic motor; Positioning stage; Micro mechanism; 超音波モータ

We have developed a high precision and high speed rotary of a multi-degree-of ? freedom stage. The stage consists of a semi sphere rotor and three stators. Applying alternative voltage to the piezoelectric ceramics adhered to the stators, travelling elastic vibration is generated to drive the rotor. We can control the travelling wave number to rotate it precisely (less than 1/1000 degree). Furthermore we have found that the stage is possible to perform the positioning operation in three rotational degrees with 1/1000 degree or less in several micro seconds within ±3 degrees.

我们开发了一种高精度和高速旋转的多自由度？自由舞台该级由一个半球形转子和三个定子组成。在定子上粘贴的压电陶瓷上施加交变电压，产生行波弹性振动，驱动转子。我们可以控制行波数来精确地旋转它（小于1/1000度）。此外，我们已经发现，该平台可以在±3度内的几微秒内以1/1000度或更小的三个旋转度执行定位操作。

项目成果

遠山 茂樹: "Control Method for a Spherical Ultrasonic Motor"the ICMA' 02 on Human-Friendly Reliable Mechatronics. 387-394 (2002)

Shigeki Toyama：“球形超声波电机的控制方法”ICMA 02 关于人类友好的可靠机电一体化 (2002)。

遠山 茂樹: "Control Method for a Spherical Ultrasonic Motor"the ICMA'02 on Human-Friendly Reliable Mechatronics. 387-384 (2002)

Shigeki Toyama：“球形超声波电机的控制方法”ICMA02 人性化可靠机电一体化。387-384 (2002)

Eko Purwanto, Shigeki Toyama, Naoki Toyota, Hiroaki Murakami: "Control Method for a Spherical Ultrasonic Motor"Proc. of the ICMA '02 on Human-Friendly Reliable Mechatronics. 387-394 (2002)

Eko Purwanto、Shigeki Toyama、Naoki Toyota、Hiroaki Murakami：“球形超声波电机的控制方法”Proc。

遠山 茂樹: "Development of an Ultrasonic Motor as a Fine-Orienting Stage"IEEE TRANSACTIONS ON ROBOTICS AND AUTOMATION. Vol.17,NO.4. (2001)

Shigeki Toyama：“作为精确定向平台的超声波电机的开发”IEEE TRANSACTIONS ON ROBOTICS AND AUTOMATION Vol.17,NO.4 (2001)。

遠山 茂樹: "Dynamics Model of Human Walking Mechanism"the ICMA' 02 on Human-Friendly Reliable Mechatronics. 447-454 (2002)

Shigeki Toyama：“人类行走机构的动力学模型”ICMA 02 关于人类友好的可靠机电一体化。 447-454 (2002)