DAMAGELESS ETCHING PROCESSES

无损蚀刻工艺

• 批准号: RGPIN-2016-03691
• 负责人: Darnon, Maxime
• 金额: $ 1.67万
• 依托单位: Université de Sherbrooke
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2022
• 资助国家: 加拿大
• 起止时间: 2022-01-01 至 2023-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=754114
• 关键词: DAMAGELESS; ETCHING; PROCESSES

Plasma etching used in micro and nano fabrication is required for precise patterning of various materials. However, it also induces damage at the surface of the etched materials. The exact impact of these modifications on devices properties is not fully understood yet.In this program, we intend to improve the understanding of plasma-induced damage and to evaluate solutions to reduce the damage. We will use silicon, III-V materials and superconducting materials as test vehicles. These materials are used for integrated circuits, high efficiency solar cells and quantum computing devices fabrication. We will base our research on an extensive characterization of the surface of materials exposed to the plasma. Plasma diagnostics will also be used to correlate materials modification with plasma properties. Based on this information, we will develop processes with minimal plasma-induced damage and we will investigate alternative plasma etching processes. This program will provide processes that will participate in the fabrication of new devices such as higher efficiency solar cells or quantum computers. In addition, it will train five highly qualified people who will be well prepared to integrate the high tech industry and develop new products which will benefit Canada's economy.

在微米和纳米制造中使用的等离子体蚀刻需要用于各种材料的精确图案化。然而，它也会在蚀刻材料的表面处引起损伤。这些修改对器件性能的确切影响尚未完全了解。在本计划中，我们打算提高对等离子体诱导损伤的理解，并评估减少损伤的解决方案。我们将使用硅、III-V族材料和超导材料作为试验载体。这些材料用于集成电路，高效太阳能电池和量子计算设备制造。我们将根据我们的研究对暴露于等离子体的材料表面的广泛表征。等离子体诊断也将用于关联材料修改与等离子体属性。基于这些信息，我们将开发具有最小等离子体诱导损伤的工艺，并研究替代等离子体蚀刻工艺。该计划将提供将参与制造新设备的过程，如更高效率的太阳能电池或量子计算机。此外，它还将培养5名高素质的人才，他们将为整合高科技产业和开发有利于加拿大经济的新产品做好充分准备。