Fundamentals of Phase Patterning Polymer Films

提出了一个实验程序来阐明在微米到亚微米长度尺度上生产具有三维图案相形态的薄膜所需的加工基础。通过控制聚合物组分与图案表面之间的相互作用，可以实现图案从约束界面向分相聚合物混合物和有序嵌段共聚物薄膜的转移。界面图案将主要使用自组装单层（sam）的烷烃硫醇在金上使用微接触印刷技术。采用端ho -端烷烃硫醇、端hooc -端烷烃硫醇、端甲基烷烃硫醇及其混合物控制界面相互作用，制备表面能可控的sam。这些实验将利用动态二次离子质谱（SIMS）和前向反冲光谱的互补深度分析能力来提供深度信息，透射电子显微镜、低压扫描电子显微镜和扫描力显微镜来提供横向和横截面膜相结构的成像，扫描拉曼显微镜来提供横向成分分析。重点将放在理解通过扩散和流动过程的嵌段共聚物薄膜的有序和岛（孔）形成的动力学，以及固体界面对这种薄膜的拓扑限制的影响，这些界面在两个块体上施加不同强度的表面场。类似地，一个主要目标将是了解如何控制相分离聚合物混合物薄膜中的表面定向spinodal分解过程，以产生具有图案形态的两相结构，从而使图案在横向和厚度方向上都延伸。在这里，固体表面对这些薄膜的拓扑限制又提出了一些重要的问题。这些实验有可能影响一系列新的加工技术，如新的光刻技术，生产选择性膜的新方法和形成薄膜光学元件的新方法。＊＊＊

9803738 Kramer An experimental program is proposed to elucidate the processing fundamentals needed to produce films with three dimensionally patterned phase morphologies on micrometer to sub-micrometer length scales. The transfer of patterns from the confining interfaces into films of both phase separating polymer mixtures and ordering block copolymers will be realized by controlling the interaction between the polymer components and the surfaces of these patterns. The interfacial patterns will be produced principally using self assembled monolayers (SAMs) of alkane thiols on Au using a microcontact printing technique. Control of interfacial interaction will be exerted by using HO-terminated alkane thiols, HOOC-terminated alkane thiols, methyl-terminated alkane thiols and their mixtures to produce SAMs with controlled surface energy. These experiments will exploit the complementary depth profiling capabilities of dynamic secondary ion mass spectrometry (SIMS) and forward recoil spectrometry to provide depth information, transmission electron microscopy, low voltage scanning electron microscopy and scanning force microscopy to provide imaging of lateral and cross-sectional film phase structures and scanning Raman microscopy to provide lateral composition profiling. Emphasis will be placed on understanding the kinetics of ordering and island (hole) formation of block copolymer films through diffusional and flow processes as well as the effects of topological confinement of such films by solid interfaces that exert surface fields of various strengths on the two blocks. Similarly a major goal will be to understand how to control surface directed spinodal decomposition process in films of phase separating polymer mixtures to produce two phase structures with patterned morphologies so that the pattern extends in both the lateral and thickness directions. Here again topological confinement of these films by solid surfaces raises important questions that will be focused on. %%% These experiments have the potential to impact a range of new processing technologies, such as new lithographic techniques, new ways to produce selective membranes and new ways to form thin- film optical elements. ***