Development of MMIC Ferrite Devices

9900266我们提出了一种制造微波单片集成电路(MMIC)铁氧体器件的新技术，即利用厚膜微晶玻璃技术将高质量的铁氧体薄片连接到硅衬底上。厚玻璃陶瓷薄膜技术是一项成熟的技术，涉及集成电路、计算机互连、隔离芯片和混合微电子电路的制造，尽管它很少与铁氧体材料一起应用。对于低频应用(2-18 GHz)，我们计划使用厚厚的微晶玻璃薄膜将单晶YIG薄膜连接到硅衬底上，而对于18 GHz以上的频率，我们首次用取向Y型铁氧体取代了YIG。该研究项目包括取向Y型铁氧体的制备、微波特性、MMIC器件的制造、一些基本微波电路的建模和测试。

9900266VittoriaWe propose to develop a novel technique for the fabrication of microwave monolithic integrated circuit (MMIC) ferrite devices by utilizing the thick film glass-ceramic technology to attach high quality ferrite slabs to silicon substrates. The thick glass-ceramic film technology is an established technology involved in the manufacturing of integrated circuits, computer interconnects, isolation chips, and hybrid microelectronic circuits, although it is rarely applied in conjunction with ferrite materials. For low frequency applications (2 - 18 GHz) we plan to use thick glass-ceramic films to attach single crystal YIG films to silicon substrates and for frequencies above 18 GHz we replace YIG with oriented Y-type ferrites for the first time. The research program entails preparation of oriented Y-type ferrites, microwave characterization, fabrication of MMIC devices, modeling of some basic microwave circuits and testing.***