MRI: Acquisition of Semiconductor Technology Lab for Undergraduate Reseasrch/training at Utah Valley State College

这项建议的主要目的是在物理系为学生和教职员工建立一个半导体技术实验室。我们预计每年至少有5名教职员工作为研究人员、顾问和导师参与约10名物理学生的学习。我们的目标不仅是服务于将继续深造的专业赛道学生，而且为那些将以终极学士学位离开学校的专业学生提供直接寻找职业就业的培训机会。我们建议在这里获得从事硅片制造和实验所需的设备。我们计划获得旋转镀膜机、Ar激光器、溅射镀膜设备、光学工作台、光学配件、紫外线光谱仪、示波器、光致抗蚀剂聚合物以及计算机接口和软件。我们的半导体技术实验室将提供从太阳能电池研究到薄膜光学元件的各种合适的本科生研究项目。在硅片技术方面的实践经验，如光致抗蚀剂涂层和曝光/显影技术、溅射方法和真空沉积技术，将是理所当然的。我们相信，晶圆制造技术方面的经验对于那些没有继续研究生学习，但需要在工业职业生涯中熟悉这些技术的物理学学生来说也是非常宝贵的。我们预计我们的半导体技术实验室将具有足够的通用性，足以让我们的一些高级学生在紫外线和软X射线光学等领域开发研究项目，可能还包括MEMS或纳米类型的设备。我们还期待与其他系合作，如电气工程和化学，为学生和教职员工提供更多的研究机会。该提案概述了在犹他谷州立学院建立半导体技术实验室的好处，该实验室既可以为大学课程的物理学研究生做准备，也可以为当地高科技就业市场培养工业物理学家、工程师和主管和经理。这将通过薄膜沉积、薄膜光学、表面物理、多层光学、硅半导体技术的项目和研究来完成，并可能在未来研究微纳结构制造、集成光学和其他意想不到的新方向。UVSC物理学学士学位要求每位获奖者从事高级论文项目。我们预计，许多高年级学生将选择通过我们建议的实验室完成论文工作。

The primary aim of this proposal is to establish a semiconductor technology laboratory in the department of physics for students and faculty. We anticipate the participation of at least 5 faculty members as researchers, advisors and mentors for about 10 physics students per year. Our aim is to serve not only professional track students who will continue on to graduate school, but to provide training opportunities for those majors who will leave school with a terminal bachelor's degree to directly seek career employment. We propose here to obtain the equipment necessary to engage in silicon wafer fabrication and experiments. We propose to obtain a spin coater, argon laser, a sputter coating device, optics table, and optical accessories, ultraviolet spectrograph, oscilloscopes, photoresist polymers, and computer interfaces and software.A variety of appropriate undergraduate research projects spanning solar cell research to thin film optical elements will be available in our semiconductor technology lab. Hands on experience in silicon wafer technologies such as photoresist coating and exposure/development techniques, sputtering methods, and vacuum deposition technologies will be learned as a matter of course. We believe that experience in fabrication techniques for wafers will also be invaluable to those physics students who do not continue to graduate studies, but will require familiarity with these techniques in industrial careers.We anticipate that our semiconductor technology lab will be versatile enough for some of our advanced students to develop research projects in areas as diverse as UV and soft X-ray optics, and perhaps in MEMS or nano-type devices. We also anticipate collaborations with other departments, such as electrical engineering and chemistry, providing students and faculty increased research opportunitiesThis proposal outlines the benefits of establishing a semiconductor technology lab at Utah Valley State College to both prepare physics graduate students for university programs, and to produce industrial physicists, engineers and supervisors and managers for the local high-tech job market. This will be accomplished with projects and research in thin film deposition, thin film optics, surface physics, multilayer optics, silicon semiconductor technology, with possible future investigations into micro- and nanostructures manufacturing, integrated optics and other unforeseen new directions.The UVSC physics baccalaureate degree requires each recipient to engage in a senior thesis project. We anticipate that many seniors will choose to perform thesis work through our proposed laboratory.