MRI: Acquisition of a Semiconductor Device Analyzer and a Probe Station for Multidisciplinary Research and Education

该项目的目标是获得一个半导体器件分析仪和一个探针站，以提高莫尔黑德州立大学在高速晶体管、微电子机械系统开关、太阳能电池和高介电常数金属氧化物方面的研究能力。该器件分析仪支持电流-电压测量以及准状态和多频电容-电压测量。探针站用于在设备分析仪和被测设备之间建立电连接。这些工具将整合到现有的相关课程中。该仪器将增加科研和科研训练的能力和范围，提高教学质量和效率。该项目的智力价值有四个方面。对高速晶体管的研究将确定介质钝化在器件退化中的作用以及势垒金属对欧姆接触的影响。对微电子机械系统开关的研究包括利用小型机械弹簧来减小接触粘滞和机械损伤的可能性。对太阳能电池的研究是为了了解基本物理因素对电池性能的影响。高介电常数材料的研究将深入了解新的栅氧化物/衬底界面，该项目将产生重大而广泛的影响。该工具将1)使参与的教员能够开展积极的研究项目并启动新的研究计划；2)为未来的学生提供长期的教育利益；3)促进招收和留住准备不足和代表性不足的学生进入工程学；以及4)更好地服务于社区大学和K-12学校。

The objective of this project is to acquire a semiconductor device analyzer and a probe station to improve the research capability on high-speed transistors, micro-electro-mechanical-systems switches, solar cells and high-dielectric constant metal oxides at Morehead State University. The device analyzer supports current-voltage measurements and quasi-state and multi-frequency capacitance-voltage measurements. The probe station is used to build an electrical link between the device analyzer and a device under testing. The instruments will be integrated to the existing related courses. The instrumentation will increase the ability and scope of research and research training, and improve the quality and efficiency of teaching and learning.The intellectual merit of this project is fourfold. The research on high-speed transistors will be conducted to identify the role of dielectric passivation at device degradation and the effect of barrier metal on ohmic contacts. The research on micro-electro-mechanical-systems switches includes investigation of the possibility of using small mechanical springs to mitigate contact stiction and mechanical damages. Research on solar cells is conducted to gain understanding of the influence of fundamental physical factors on cell performance. The research on high-dielectric constant materials will gain insight into new gate oxide/substrate interfaces.The project will have significant broader impacts. The instrumentation will 1) enable the faculty involved to conduct their active research projects and initiate new research programs; 2) offer long-term educational benefits to future students; 3) boost recruitment and retention of underprepared and underrepresented students into engineering, and 4) better serve community colleges and K-12 schools.