MRI: Acquisition of a Semiconductor Device Analyzer and a Probe Station for Multidisciplinary Research and Education

MRI：采购半导体器件分析仪和探针台，用于多学科研究和教育

• 批准号: 0923079
• 负责人: Qingzhou Xu
• 金额: $ 17.55万
• 依托单位: Morehead State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2009
• 资助国家: 美国
• 起止时间: 2009-09-01 至 2011-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0923079&HistoricalAwards=false
• 关键词: MRI; Acquisition; Semiconductor; Device; Analyzer

The objective of this project is to acquire a semiconductor device analyzer and a probe station to improve the research capability on high-speed transistors, micro-electro-mechanical-systems switches, solar cells and high-dielectric constant metal oxides at Morehead State University. The device analyzer supports current-voltage measurements and quasi-state and multi-frequency capacitance-voltage measurements. The probe station is used to build an electrical link between the device analyzer and a device under testing. The instruments will be integrated to the existing related courses. The instrumentation will increase the ability and scope of research and research training, and improve the quality and efficiency of teaching and learning.The intellectual merit of this project is fourfold. The research on high-speed transistors will be conducted to identify the role of dielectric passivation at device degradation and the effect of barrier metal on ohmic contacts. The research on micro-electro-mechanical-systems switches includes investigation of the possibility of using small mechanical springs to mitigate contact stiction and mechanical damages. Research on solar cells is conducted to gain understanding of the influence of fundamental physical factors on cell performance. The research on high-dielectric constant materials will gain insight into new gate oxide/substrate interfaces.The project will have significant broader impacts. The instrumentation will 1) enable the faculty involved to conduct their active research projects and initiate new research programs; 2) offer long-term educational benefits to future students; 3) boost recruitment and retention of underprepared and underrepresented students into engineering, and 4) better serve community colleges and K-12 schools.

该项目的目标是获得一个半导体器件分析仪和一个探针站，以提高莫尔黑德州立大学在高速晶体管、微机电系统开关、太阳能电池和高介电常数金属氧化物方面的研究能力。设备分析仪支持电流电压测量和准状态和多频电容电压测量。探针站用于在设备分析仪和被测设备之间建立电气连接。这些文书将并入现有的有关课程。该仪器将增加研究和研究训练的能力和范围，提高教与学的质量和效率。这个项目的智力价值是四倍的。在高速晶体管上的研究将确定介质钝化在器件退化中的作用以及阻挡金属对欧姆接触的影响。微机电系统开关的研究包括研究使用小机械弹簧来减轻接触粘滞和机械损伤的可能性。对太阳能电池进行研究，以了解基本物理因素对电池性能的影响。对高介电常数材料的研究将有助于探索新的栅极氧化物/衬底界面。该项目将产生更广泛的重大影响。该仪器将1)使参与的教师能够开展他们积极的研究项目并启动新的研究项目；2)为未来的学生提供长期的教育利益；3)增加招收和留住准备不足和代表性不足的学生进入工程领域，4)更好地为社区大学和K-12学校服务。