MRI: Acquisition of a Lithography Enabled SEM and Nanoimprinter for the Fabrication of Nanostructures

这一奖项授予俄勒冈大学，以获得热场发射扫描电子显微镜，该显微镜配置用于专用电子束光刻和纳米压印光刻系统。这些高度互补的设备将安置在俄勒冈州先进材料表征中心(CAMCOR)，该中心为俄勒冈州和太平洋西北部的研究社区提供服务。该仪器将产生广泛的影响，大大加强区域基础设施的自上而下的光刻制造纳米结构。这些设备将立即影响俄勒冈大学、俄勒冈州立大学和波特兰州立大学化学、物理和工程系的七个材料相关研究小组。这些小组的研究涉及分子马达的基本原理、纳米结构中的电荷传输和纳米尺度的光流动，以及在传感和分布式能源和化学系统中应用的功能微结构和纳米结构的制造方法。这些研究最终都将有助于新型功能材料和器件的开发。该仪器还将用于一些专门的本科生和研究生水平的课程，重点是半导体器件操作和制造的基础材料化学和物理。这一奖项授予俄勒冈大学，以获得热场发射扫描电子显微镜，该显微镜配置用于专用电子束光刻和纳米压印光刻系统。该设备用于制造和复制具有纳米级特征的清晰结构。这种结构将被整个地区的研究人员用来努力理解纳米级物质。对这一问题的基本理解将有助于在从新型电子和光学设备到高效化学制造方法的各种应用中推进最先进的技术。该奖项提供的设备将通过在原始科学研究、实验室课程和本科生暑期科学体验中的使用，对化学、物理和工程接口的本科生和研究生的教育产生重大影响。

This award is to the University of Oregon to acquire a thermal field emission scanning electron microscope configured for dedicated electron beam lithography and a nano-imprint lithography system. This highlycomplementary equipment will be housed in the Center for Advanced Materials Characterization in Oregon (CAMCOR), which serves the research community in Oregon and the Pacific Northwest. The instrumentationwill have a broad impact by greatly enhancing the regions infrastructure for the top-down lithographic fabrication of nanostructures. The equipment will immediately impact seven materials-related researchgroups in chemistry, physics, and engineering departments at the University of Oregon, Oregon State University and Portland State University. The research of these groups are addressing fundamentalprinciples underlying molecular motors, charge transport through nanostructures, and the flow of light at the nanometer scale, as well as methods for the fabrication of functional micro- and nanostructures forapplications in sensing and distributed energy and chemical systems. These studies will all ultimately contribute to the development of new types of functional materials and devices. The instrumentation willalso be used in a number of specialized undergraduate and graduate level programs focused on materials chemistry and physics underlying the operation and fabrication of semiconductor devices. This award is to the University of Oregon to acquire a thermal field emission scanning electron microscope configured for dedicated electron beam lithography and a nano-imprint lithography system. This equipmentis used for the fabrication and reproduction of well defined structures with nanometer scale features. Such structures will be used by researchers throughout the region in their efforts to understand nanoscale matter. The fundamental understanding of such matter will contribute to advancing the state-of-the-art in a variety of applications ranging from new types of electronic and optical devices to efficient chemical manufacturing methods. The equipment made possible by this award will have a substantial impact on educating undergraduate and graduate students at the chemistry, physics, and engineering interface through its use in original scientific research, laboratory-based courses, and undergraduate summer science experiences.