Collaborative Research: MEMS from Organized Mesoscale Architectures of Carbon Nanotubes

本研究的目的是利用定向碳纳米管的介观组装，以创建一类新的MEMS器件的驱动和传感应用，具有增强的灵敏度和多功能性。 这将通过结合两个PI在硅基衬底上定向CNT生长、微观分析、电化学器件表征（Ramanath）和MEMS制造、电刺激下运动动力学表征和摩擦学（Turner）方面的独特技能和专业知识来实现。 特别是，我们将制造测试设备结构，如CNT集成的SiO2/Si梳状驱动器和悬臂梁结构，并测量它们对电化学和电刺激的机械响应。 此外，将评估CNT-MEMS组件的粘合剂、阻尼和摩擦学特性。 智力价值和更广泛的影响：这项工作将使单个CNT的有吸引力的机械性能转化为一种全新的“突破”技术，即通过标准的微米和纳米纤维在Si基MEMS平台上实现基于CNT-介观结构的微器件和系统。任何测试设备结构的成功都将为实现基于与Si技术集成的一维纳米结构的新型设备铺平道路。该项目将提供一个独特的跨学科接触参与研究生在两个PI的研究小组在材料科学和应用力学的接口，特别是在纳米结构合成，微器件制造和测试领域。新兴的和令人兴奋的MEMS与纳米结构集成的领域将作为一个非常适合的媒介，在我们的推广活动，以吸引聪明的高中学生的科学和工程。

The objective of this research is to harness mesoscale assemblies of oriented CNTs to create a new class of MEMS devices for actuation and sensing applications, with enhanced sensitivity and versatility. This will be achieved by combining the unique skill-sets and expertise of the two PIs in oriented CNT growth on Si-based substrates, microanalysis, electrochemical device characterization (Ramanath), and MEMS fabrication, characterization of the dynamics of their motion under electrical stimuli, and tribology (Turner). In particular, we will fabricate test-device structures such as CNT-integrated SiO2/Si comb-drives and cantilever structures, and measure their mechanical responses to electrochemical and electrical stimuli. Additionally, adhesive, damping, and tribological properties of the CNT-MEMS components will be evaluated. The intellectual merit and broader impact: This work will enable the translation of the attractive mechanical properties of individual CNTs into a completely new "break-through" technology of CNT-mesostructrure-based microdevices and systems on Si-based MEMS platforms via standard micro and nanofabrication. The success of any of the test-device structures will pave the way for the realization of a new class of devices based on one-dimensional nanostructures integrated with Si technology. This project will provide a unique cross-disciplinary exposure to participating graduate students in the two PIs' research groups at the interface of materials science and applied mechanics, particularly in the areas of nanostructure synthesis, microdevice fabrication, and testing. The newly emerging and exciting area of MEMS integrated wth nanostructures will serve as a well-suited medium in our outreach activities to attract bright high-school students to science and engineering.