Materials World Network: NSF-Germany (DFG) Materials Collaboration: LIGA Ni-base Superalloys for MEMS Applications

该项目建立了一个基于科学的协议，用于优化加工和热处理路线，以生产一类新材料（电沉积镍基高温合金），这将大大提高电沉积LIGA材料的功能。来自约翰霍普金斯大学（JHU）和卡尔斯鲁厄理工学院（KIT）的一个国际研究小组合作完成了这项任务。Overwestern的科学问题，这个团队解决包括：（一）控制和优化电沉积参数，均匀夹带铝纳米粒子在电沉积镍微组件，（二）开发所需的热处理时间表转化为沉积的绿色复合材料？×？{?高温合金显微组织，和（iii）表征所得的显微组织和伴随的机械性能。研究小组的密切互动可以优化工艺流程，并为MEMS应用创造新型高温LIGA电沉积镍基高温合金。这种合作的技术动机来自于扩大当前MEMS材料的温度能力的机会。迄今为止，大多数商用MEMS器件都是使用化学和气相沉积工艺制造的薄膜传感器。LIGA镍基高温合金的出现将极大地拓展下一代MEMS器件的设计空间。镍基高温合金电沉积工艺流程的开发也将为电沉积修复策略奠定基础，电沉积修复策略将在修复用于喷气推进和发电的涡轮机叶片方面提供巨大的技术和经济优势。研究生和高级人员的国际交流推动并实现了这种合作，并为所有参与者提供了独特的教育体验。此外，拟议通过在JHU的指导和对KIT的外国访问将巴尔的摩市高中学生包括在内，这将大大扩大他们的学术和文化视野。

This project establishes a science-based protocol for optimizing processing and heat treatment routes to produce a new class of materials (electrodeposited Ni-base superalloys) that will dramatically improve the functionality of electrodeposited LIGA materials. An international research team from Johns Hopkins University (JHU) and the Karlsruhe Institute of Technology (KIT) collaborate on this task. Overarching scientific issues addressed by this team include: (i) control and optimization of electrodeposition parameters to uniformly entrain Al nano-particles in electrodeposited Ni micro-components, (ii) development of heat treat schedules required to transform the as-deposited green composites into ?×?{?ס¦ superalloy microstructures, and (iii) characterization of the resultant microstructures and attendant mechanical properties. Close interaction of the research groups allows for optimization of the process flow and result in the creation of novel high temperature LIGA electrodeposited Ni-base superalloys for MEMS applications.The technological motivation for this collaboration is derived from the opportunity to expand the temperature capability of current MEMS materials. To date, the majority of commercial MEMS devices have been thin film sensors manufactured using chemical and vapor deposition processes. The availability of LIGA Ni-base superalloys would greatly expand the design space for next generation MEMS devices. Development of a process flow for electrodeposition of Ni-base superalloys will also lay the foundation for electrodeposition repair strategies that would provide tremendous technological and economic advantage in the repair of turbine blades for both jet propulsion and power generation. International exchanges of graduate students and senior personnel fuel and enable this collaboration and provide a unique educational experience for all participants. Moreover, the proposed inclusion of Baltimore city high school students through mentoring at JHU and a foreign visit to KIT will greatly expand their academic and cultural horizons.