MRI: Acquisition of a Dual Focued Ion/Electron Beam (FIB) Imaging and Nano-Fabrication Tool

技术摘要布朗大学的这份核磁共振提案请求支持购买FEI Nova 600i NanoLab双光束扫描电子显微镜/FIB，用于纳米级原型制作、加工、表征和分析亚100纳米区域的结构。布朗大学的研究横跨工程、物理、化学、地质学和医学，专注于以纳米尺度材料的操纵和表征为核心的研究。一些正在进行的研究将利用新的双光束仪器进行，包括：钢的高应变率变形研究，将提取高度局域绝热剪切带(ASB)的纳米级特征进行透射电子显微镜分析；为生物分子分析创建纳米孔原型装置结构，需要电子束产生气孔的选择性金属化；多相结构材料中起始裂纹的产生，原位监测裂纹扩展，通过连续切片和电子背散射衍射(EBSD)重建裂纹路径；用于有图案的磁性介质的纳米颗粒阵列的操纵；以及微创、有选择地去除夹杂物，以确定无价考古玻璃样品的来源。更广泛地说，所选仪器将为Brown研究人员提供在纳米尺度上创建、修改和表征复杂结构的能力，例如从特定的形态特征中提取透射电子显微镜样本，为微结构的EBSD分析产生三维连续切片，以及制造用于检查纳米材料物理性能的独特测试结构。布朗的纳米材料研究的增长使我们的电子显微镜中央设施(EMCF)的现有能力变得紧张，并暴露了对只能由双光束FIB/SEM仪器提供的能力的迫切需求。当添加到Brown EMCF用户设施中时，该工具是罗德岛州唯一的工具，将向该州和新英格兰东南部的所有研究人员提供。非技术摘要随着新的双光束扫描电子显微镜/FIB的获得，布朗大学的研究人员现在将能够以一种允许在纳米尺度上创建纳米机器和结构原型的方式来观察和操纵纳米材料。在上个世纪，电子显微镜使人们能够在材料中形成实际的照片图像，这些材料的大小只有几个原子或分子，用其他方法是看不到的。现在，一种新型的工具(双光束扫描电子显微镜/FIB)使用电子束和聚焦的离子束来同时看到和触摸纳米级，使科学家能够组装具有定制的机械、化学和/或光学特性的新材料和设备。布朗大学工程、物理、化学、地质、生物学和考古学的研究人员将利用新型双光束扫描电子显微镜/FIB(罗德岛唯一的)的能力，在广泛的应用中创建、修改和表征纳米材料，包括检测DNA和其他生物分子的设备、新的磁存储设备，以及设计更强、更轻的材料。

Technical AbstractThis MRI proposal by Brown University requests support for the acquisition of an FEI NOVA 600i Nanolab DualBeam SEM/FIB for nanoscale prototyping, machining, characterization and analysis of structures in the sub-100-nm regime. Research at Brown spanning engineering, physics, chemistry, geology, and medicine is focused on research that has, at its core, the manipulation and characterization of materials on the nanoscale. Some ongoing research that will make use of the new Dual Beam instrument includes: studies of high strain rate deformation of steel where nanoscale features of highly localized adiabatic shear bands (ASB) will be extracted for TEM analysis; creation of nanopore-based prototype device structures for biomolecule analysis that require the selective metallization of e-beam created pores; generation of initiation cracks in multiphase structural materials, in situ monitoring of crack propagation, and the reconstruction of the crack path by serial-sectioning and electron backscatter diffraction (EBSD); manipulation of nanoparticle arrays for patterned magnetic media applications; and minimally invasive, selective removal of inclusions for the identification of the origins of priceless archeological glass samples. More broadly, the selected instrument will provide Brown researchers with the ability to create, modify, and characterize complex structures on the nanoscale, e.g. to extract TEM samples from specific morphological features, to produce three-dimensional serial sections for EBSD analysis of microstructure, and to fabricate unique test structures for examining physical properties of nanomaterials. The growth in nano-materials research at Brown has strained the existing capacity of our Electron Microscope Central Facility (EMCF) and has exposed an urgent need for the capabilities that can only be provided by a Dual Beam FIB/SEM instrument. When added to the Brown EMCF user facility, this tool, the only one in Rhode Island, will be available to all researchers in the state and southeast New England. Non-Technical AbstractWith the acquisition of a new dual beam SEM/FIB, Brown University researchers will now be able to both see and manipulate nanomaterials in a way that will allow the creation of prototype nanomachines and structures on the nanoscale. In the last century, the electron microscope allowed actual photographic images to be formed of features in materials that are just a few atoms or molecules in size, and impossible to see by other means. Now, a new type of tool (the dual beam SEM/FIB) uses electron beams and focused ion beams to simultaneously see and touch on the nanoscale, allowing scientists to assemble new materials and devices with tailored mechanical, chemical, and/or optical properties. Researchers at Brown in Engineering, Physics, Chemistry, Geology, Biology, and Archeology will use the capabilities of the new dual beam SEM/FIB (the only one in Rhode Island) to create, modify, and characterize nanomaterials in a wide array of applications, including devices for the detection of DNA and other biomolecules, new magnetic storage devices, and design of stronger and lighter materials.