SGER: Integrated Indium Phosphide Based Microsystem for Chemical Sensing

摘要：目的：研究基于磷化铟衬底的高灵敏度化学传感微系统的可行性。智力优势：本提案探索了在磷化铟衬底上使用集成系统进行化学物质光学检测的可能性。它将包括一个激光源，直接集成微悬臂和光电探测器，这将允许精确跟踪悬臂的谐振频率。悬臂上的功能化涂层将用于吸收环境中的化学物质，这种相互作用将改变悬臂的质量，从而改变悬臂的谐振频率。该系统的实现将包括一个伺服控制电路。微机械和光子系统的集成有望产生非常高的灵敏度。更广泛的影响：该项目具有广泛的跨学科范围，包括光子学，微力学和化学传感。除了它的研究成果外，它还有望成为本科生和研究生教学的好工具。研究结果将通过课堂教学和讲习班传播。

SummaryObjective:The objective of this effort is to investigate the feasibility of a highly sensitive microsystem for chemical sensing based on an indium phosphide substrate.Intellectual Merit: This proposal explores the possibility of optical detection of chemicals using an integrated system on an indium phosphide substrate. It will include a laser source, integrated directly with a microcantilever and photodetectors, that will permit the precise tracking of the resonant frequency of the cantilever. Functionalized coatings on the cantilever will be used to absorb chemicals from the environment and this interaction will change the mass, and consequently, the resonant frequency, of the cantilever. The system implementation will include a servo-control circuit. The integration of a micromechanical and photonic system is expected to yield very high sensitivity.Broader Impact: This project has substantial interdisciplinary scope, encompassing photonics, micromechanics, and chemical sensing. In addition to its research outcome, it promises to be a good vehicle for teaching students at both undergraduate and graduate levels. The research results will be disseminated through classroom instruction and workshops.