MRI: Acquisition of a Semiconductor Device Analyzer and a Probe Station for Multidisciplinary Research and Education

该项目的目标是获得一台半导体器件分析仪和一个探针台，以提高莫尔黑德州立大学在高速晶体管、微机电系统开关、太阳能电池和高介电常数金属氧化物方面的研究能力。器件分析仪支持电流-电压测量以及准状态和多频率电容-电压测量。探针台用于在器件分析仪和被测器件之间建立电连接。这些工具将整合到现有的相关课程中。仪器将增加研究和研究培训的能力和范围，并提高教学和学习的质量和效率。将对高速晶体管进行研究，以确定电介质钝化在器件退化中的作用以及阻挡层金属对欧姆接触的影响。微机电系统开关的研究包括使用小机械弹簧来减轻接触摩擦和机械损伤的可能性的研究。对太阳能电池的研究是为了了解基本物理因素对电池性能的影响。对高介电常数材料的研究将有助于深入了解新的栅氧化层/衬底界面，该项目将产生重大而广泛的影响。仪器将1）使参与教师进行积极的研究项目，并启动新的研究计划; 2）提供长期的教育利益，未来的学生; 3）促进招聘和保留准备不足和代表性不足的学生进入工程，和4）更好地服务于社区学院和K-12学校。

The objective of this project is to acquire a semiconductor device analyzer and a probe station to improve the research capability on high-speed transistors, micro-electro-mechanical-systems switches, solar cells and high-dielectric constant metal oxides at Morehead State University. The device analyzer supports current-voltage measurements and quasi-state and multi-frequency capacitance-voltage measurements. The probe station is used to build an electrical link between the device analyzer and a device under testing. The instruments will be integrated to the existing related courses. The instrumentation will increase the ability and scope of research and research training, and improve the quality and efficiency of teaching and learning.The intellectual merit of this project is fourfold. The research on high-speed transistors will be conducted to identify the role of dielectric passivation at device degradation and the effect of barrier metal on ohmic contacts. The research on micro-electro-mechanical-systems switches includes investigation of the possibility of using small mechanical springs to mitigate contact stiction and mechanical damages. Research on solar cells is conducted to gain understanding of the influence of fundamental physical factors on cell performance. The research on high-dielectric constant materials will gain insight into new gate oxide/substrate interfaces.The project will have significant broader impacts. The instrumentation will 1) enable the faculty involved to conduct their active research projects and initiate new research programs; 2) offer long-term educational benefits to future students; 3) boost recruitment and retention of underprepared and underrepresented students into engineering, and 4) better serve community colleges and K-12 schools.