MRI: Acquisition of Semiconductor Technology Lab for Undergraduate Reseasrch/training at Utah Valley State College

MRI：收购犹他谷州立学院本科生研究/培训半导体技术实验室

• 批准号: 0216598
• 负责人: Alex Panin
• 金额: $ 10.21万
• 依托单位: Utah Valley University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2002
• 资助国家: 美国
• 起止时间: 2002-09-01 至 2004-01-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0216598&HistoricalAwards=false
• 关键词: MRI; Acquisition; Semiconductor; Technology; Lab

The primary aim of this proposal is to establish a semiconductor technology laboratory in the department of physics for students and faculty. We anticipate the participation of at least 5 faculty members as researchers, advisors and mentors for about 10 physics students per year. Our aim is to serve not only professional track students who will continue on to graduate school, but to provide training opportunities for those majors who will leave school with a terminal bachelor's degree to directly seek career employment. We propose here to obtain the equipment necessary to engage in silicon wafer fabrication and experiments. We propose to obtain a spin coater, argon laser, a sputter coating device, optics table, and optical accessories, ultraviolet spectrograph, oscilloscopes, photoresist polymers, and computer interfaces and software.A variety of appropriate undergraduate research projects spanning solar cell research to thin film optical elements will be available in our semiconductor technology lab. Hands on experience in silicon wafer technologies such as photoresist coating and exposure/development techniques, sputtering methods, and vacuum deposition technologies will be learned as a matter of course. We believe that experience in fabrication techniques for wafers will also be invaluable to those physics students who do not continue to graduate studies, but will require familiarity with these techniques in industrial careers.We anticipate that our semiconductor technology lab will be versatile enough for some of our advanced students to develop research projects in areas as diverse as UV and soft X-ray optics, and perhaps in MEMS or nano-type devices. We also anticipate collaborations with other departments, such as electrical engineering and chemistry, providing students and faculty increased research opportunitiesThis proposal outlines the benefits of establishing a semiconductor technology lab at Utah Valley State College to both prepare physics graduate students for university programs, and to produce industrial physicists, engineers and supervisors and managers for the local high-tech job market. This will be accomplished with projects and research in thin film deposition, thin film optics, surface physics, multilayer optics, silicon semiconductor technology, with possible future investigations into micro- and nanostructures manufacturing, integrated optics and other unforeseen new directions.The UVSC physics baccalaureate degree requires each recipient to engage in a senior thesis project. We anticipate that many seniors will choose to perform thesis work through our proposed laboratory.

本计画的主要目的是在物理系建立一个半导体技术实验室，供师生使用。我们预计每年至少有5名教师作为研究人员，顾问和导师参与约10名物理学生。我们的目标是不仅服务于将继续进入研究生院的专业轨道学生，而且为那些将离开学校获得终端学士学位直接寻求职业就业的专业提供培训机会。我们在这里建议获得从事硅晶片制造和实验所需的设备。我们建议获得旋涂机，氩激光器，溅射镀膜设备，光学台和光学配件，紫外光谱仪，扫描仪，光致抗蚀剂聚合物，以及计算机接口和软件。各种适当的本科研究项目，从太阳能电池研究到薄膜光学元件，将在我们的半导体技术实验室提供。在硅片技术，如光刻胶涂层和曝光/显影技术，溅射方法和真空沉积技术的实践经验将作为一个理所当然的事情学习。我们相信，对于那些不再继续攻读研究生课程，但在工业生涯中需要熟悉这些技术的物理专业学生来说，晶圆制造技术方面的经验也是非常宝贵的。我们预计，我们的半导体技术实验室将具有足够的功能，可以让我们的一些高级学生在紫外线和软X射线光学等不同领域开展研究项目，并且可能在MEMS或纳米型器件中。我们还预计与其他部门，如电气工程和化学，为学生和教师提供更多的研究opportunitiesThis建议概述了在犹他州谷州立大学建立半导体技术实验室的好处，既准备物理研究生的大学课程，并产生工业物理学家，工程师和主管和经理为当地的高科技就业市场。这将通过薄膜沉积，薄膜光学，表面物理，多层光学，硅半导体技术的项目和研究来完成，未来可能会对微米和纳米结构制造，集成光学和其他不可预见的新方向进行调查。UVSC物理学士学位要求每个收件人从事高级论文项目。我们预计许多高年级学生会选择通过我们提议的实验室进行论文工作。