EAGER: Quantum Manufacturing: Three-Dimensional Printing of Meta-Photonic Elements for Chip-based Quantum Devices

EARLY概念探索性研究（EAGER）量子制造奖将支持研究，为制造基于光的小型化量子设备产生科学知识。由量子效应实现的计算、传感和通信的极端性能增强有可能改变各个领域的科学和技术。虽然这些效应中的许多已经在研究实验室中得到了证明，但实际的低成本量子设备还没有广泛使用。一个主要的限制是需要庞大的光学元件来操纵这些设备内的光。可以通过纳米级结构将这些光学元件封装起来，但这种结构既不能快速制造，也不能以广泛操纵光所需的各种形状制造。该奖项支持基础研究，以产生快速打印各种形状的精细纳米结构所需的知识，并将这些结构转化为功能光学器件。小型化的光学器件可以将量子设备从昂贵而笨重的桌面系统转变为负担得起的小型掌上设备。因此，这项工作可以使量子技术广泛使用，从而改善国家安全，提高美国经济竞争力，提高生活质量。通过在量子制造的新兴领域培训来自不同背景的学生，该项目将有助于培养具有全球竞争力和多元化的STEM劳动力。基于投影双光子光刻的纳米级3D打印可以打印聚合物体积像素（即，体素），但是这些体素在形状上受到限制并且不具有期望的光学特性。控制体素的尺寸和形状对于实现期望的光学功能是至关重要的，但是用于实现期望的几何形状的工艺参数组合是未知的。此外，对于将3D聚合物结构转换成光学材料的图案转移技术的知识有限，因为大多数技术针对2D结构进行了优化。该项目将填补这些知识空白，并生成一套元光子学设计规则和构建模块，以最佳方式利用这些功能并避免制造方法的限制。这些目标将通过印刷和图案转移过程的经验研究和基于物理的建模相结合，以及通过元光子器件设计，制造和测试来实现。这项工作将为设计和制造元光子器件的必要路线图提供第一步，这些元光子器件可以使用该方法实现量子应用的波前工程，类似于铸造厂的工艺设计套件-该奖项反映了NSF的法定使命，并通过使用基金会的知识价值和更广泛的影响审查进行评估，被认为值得支持的搜索.

This EArly-concept Grant for Exploratory Research (EAGER) Quantum Manufacturing award will support research to generate scientific knowledge for the manufacturing of light-based miniaturized quantum devices. The extreme performance enhancements in computing, sensing, and communications that are enabled by quantum effects have the potential to transform both science and technology in various fields. Although many of these effects have already been demonstrated in research laboratories, practical low-cost quantum devices are not widely available. A major limitation is the need for bulky optical components to manipulate light within these devices. It is possible to miniaturize these optical components through nanoscale structures, but such structures can neither be fabricated rapidly nor in the variety of shapes required for extensive manipulation of light. This award supports fundamental research to generate the knowledge required to rapidly print fine nanoscale structures of various shapes and to convert these structures into functional optical devices. Miniaturized optics can transform quantum devices from expensive and bulky table-top systems into affordable and small palm-top devices. This work can therefore make quantum technology widely accessible and thereby improve national security, increase U.S. economic competitiveness, and enhance the quality of life. By training students from different backgrounds in the emerging area of quantum manufacturing, this project will help develop a globally competitive and diverse STEM workforce. Nanoscale 3D printing based on projection two-photon lithography can print polymeric volumetric pixels (i.e., voxels) on the 100 nm scale for meta-photonics but these voxels are limited in shape and do not have the desired optical properties. Controlling the size and shape of the voxels is critical to achieving the desired optical function, but the process parameter combinations for achieving the desired geometries are unknown. Additionally, there is limited knowledge on pattern transfer techniques for converting 3D polymeric structures into optical materials as most techniques are optimized for 2D structures. This project will fill these knowledge gaps and generate a set of meta-photonics design rules and building blocks that optimally leverage the capabilities and avoid the limitations of the manufacturing approach. The objectives will be achieved through a combination of empirical studies and physics-based modeling of the printing and pattern-transfer processes as well as through meta-photonic device design, fabrication, and testing. This effort will provide the initial step for the necessary roadmap for the design and manufacturing of the meta-photonic devices that can enable wavefront engineering for quantum applications using the approach, similar to the process design kits of the foundry-based fabrication processes.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.