Tri-axial micro probe with isotropic mechanical behavior for the transfer into the industrial micro coordinate measuring technology (3-MiTiK)

尽管在微坐标测量技术领域进行了多年的研究，但目前还没有可靠的解决方案来完全满足工业和研究在测量精度、三维结构探测和稳健性方面日益增长的计量需求。该知识转移项目的目标是联合开发、微制造和测试具有各向同性机械性能的三轴微探头，用于坐标测量机，用于完整和高精度的三维微结构和微部件测量。为了为成功的知识转移创造条件，与转移伙伴在价值链的两个不同层面，即微技术和CMM系统进行合作是必不可少的。因此，该项目的应用合作伙伴一方面是非常年轻的初创公司5Microrons，其专长在于微技术领域，另一方面是生产和销售齿轮计量用坐标测量机的Klingelnberg公司。该项目的主要研究假设如下：1.利用机械力传递的体现，它在很大程度上独立于压阻传感，使得新的微探头设计成为可能，在不影响测量灵敏度的情况下，具有机械各向同性和增强的稳健性。2.随着电火花加工工艺的进一步发展，特别是在定向电火花加工和一次脉冲电火花加工中，可以得到直径为50微米、形状偏差为1微米、粗糙度在10 nm以内的更小的探测球。3.使用用于微型探头的机械接口、无线信号传输和用于微型部件的夹具的微环境的新的集成方法使得新的微型探头可以用于也可用于商业上的各种坐标测量机，并且可以成功地转移到工业用途。通过这些改进，可以得到更坚固、更准确、更好、更通用的可积式微探头的原型，这可以作为商业产品开发的起点。此外，这种新的触觉计量学在生物力学中的应用以及由此产生的新的研究问题将与转移伙伴5微米一起考虑。

Despite years of research in the field of micro coordinate measurement technology, there are currently no reliable solutions that fully meet the increasing demands of metrology for industry and research in terms of measurement accuracy, probing of three-dimensional structures and robustness. The aim of this knowledge transfer project is the joint development, micro fabrication and testing of a tri-axial micro-probe with isotropic mechanical properties for use in a coordinate measuring machine for complete and highly accurate measurements of 3D microstructures and micro components. In order to create the conditions for successful knowledge transfer, collaborations with transfer partners at two different levels of the value chain, namely the micro-technology and the CMM systems are essential. Application partners of the project are therefore on the one hand the very young startup company 5microns, whose expertise lies in the field of microtechnology, and on the other hand the company Klingelnberg which produces and sells CMMs for gear metrology. The central research hypotheses of the project can be described as follows: 1. With an embodiment of the mechanical force transmission, which is largely independent of the piezoresistive sensing, new micro probe designs are enabled, which have both a mechanical isotropy and an increased robustness without compromising the measurement sensitivity. 2. With further development of the processes of Electrical Discharge Machining especially in the direction Electro-Chemical Machining and One Pulse Electrical Discharge much smaller probing spheres, namely with 50 micron diameter and shape deviations < 1 micron and a roughness in the range of several 10 nm are achievable. 3. New integration approaches using a mechanical interface for the micro probe, a wireless signal transmission and a microenvironment with a jig for micro-components allow that new micro probes can be used in various CMMs also commercially available and can be successfully transferred to industrial use. With these improvements, the prototype of a more robust, more accurate, better and more versatile integrable microprobe is available, which can be the starting point of a commercial product development. In addition, an application of this new tactile metrology in biomechanics and therefrom resulting new research questions will be considered together with the transfer partner 5microns.