Plasma-enhanced atomic-layer deposition system with in situ spectroscopic ellipsometer

要求提供资金，用于等离子体增强原子层沉积系统，该系统配备有用于过程监测的现场光谱椭圆偏振仪，以及对沉积薄膜的综合评价。该集成仪器将安装在TUM Walter Schottky Institute的纳米材料和纳米技术中心（ZNN）。该系统将成为Pl研究的关键工具，致力于开发氮化物和氮氧化物基材料，并将其应用于将阳光转化为可再生燃料。作为ZNN的独特功能，该仪器还将支持更广泛的慕尼黑地区内的纳米级系统研究，特别是能量转换。PI是TUM的新教员，并设想通过这种能力提交多个新的研究提案。初步研究项目将包括以下内容：i）开发氮化物和氮氧化物半导体，例如TaON和钙钛矿氮氧化物，用于光电化学太阳能转换，ii）用于半导体的光化学稳定和用于高效（光）电催化的多功能薄膜的沉积和表征，和iii）先进光化学能量转换系统中电荷提取和效率损失机制的操作表征。拟议的仪器将补充现有的基础设施，并提供独特的控制成分，相位和反应性，这是必要的追求这些研究目标。

Funding is requested for a plasma-enhanced atomic layer deposition system equipped with in situ spectroscopic ellipsometry for process monitoring, as well as for comprehensive evaluation of deposited films. The integrated instrument will be installed in the Center for Nanomaterials and Nanotechnology (ZNN) of the Walter Schottky Institute, TUM. The system will be a key tool in the Pl's research dedicated to the development of nitride and oxynitride-based materials with application for conversion of sunlight into renewable fuels. Being a unique capability housed in the ZNN, the instrument will also support research into nanoscale systems, especially for energy conversion, within the broader Munich area. The PI is a new faculty member at TUM and envisions the submission of multiple new research proposals enabled by this capability. Initial research projects, will include the following: i) Development of nitride and oxynitride semiconductors, such as TaON and perovskite oxynitrides, for photoelectrochemical solar energy conversion, ii) Deposition and characterization of multi­functional thin films for photochemical stabilization of semiconductors and for high efficiency (photo)electrocatalysis, and iii) Operando characterization of charge extraction and efficiency loss mechanisms in advanced photochemical energy conversion systems. The proposed instrumentation will complement existing infrastructure and provides unique control over composition, phase, and reactivity that is necessary to pursue these research aims.