Establishment of novel microscale surface treatment/processing technology with ultra-small plasma beam

在本项目中，我们开展了以下工作：(1)利用直流、交流和甚高频等离子体发生器产生了从2 mm到25μmφ的各种类型的小束等离子体。特别是本课题组提出并研制的热电子增强微米级等离子体(TEMP)使小尺寸等离子体的产生变得容易。典型的表演实例如下：(A)小尺寸(从2 mm到25μmφ)。(B)多探头(6个)。(2)对各种等离子体(气体：N_2、O_2、Ar，功率：0.1-30W，气体流量：0-1000sccm，压力：7600-40torr)进行了光谱表征，得到了不同的等离子体条件，如热等离子体、冷等离子体和界面等离子体的典型等离子体温度。例如，在760torr下，Ar气体的气体温度约为4000-5000K。(3)利用这些超小等离子体束，我们成功地进行了如下各种微加工：(A)金属(Fe，Al，Cu)的熔化。(B)氧化。(C)沉积(C系统)。特别是由于匹配性能的提高，远离等离子体产生电源，我们可以产生如此小的等离子体和穿孔表面处理，如上所述。

In this project, we performed an establishment of novel microscale surface treatment/processing technology with ultrta-small plasma beam as followed.(1) We generated various type small beam plasmas ranging from 2mm to 25μmφusing dc, ac, and VHF plasma generator. Especially, thermoelectron enhancede micrometer-scale plasma (TEMP), which had been proposed and developed by our group made it easy to generate a small size plasma. Examples of typical performances were as follows: (A) small size (from 2mm to 25μmφ). (B) multi probes (six). (C) low sustain power (1W).(2) The various plasmas (gas : N2, O2, Ar, power : 0.1-30W, gas flow : 0-1000sccm, preasure : 7600-40torr) were characterized by optical emission spectroscopy, which shows the various plasma conditions, such as typical plasma temperatures of three plasmas, namely as thermal, cold, and interface plasma. For instance, the gas temperature of Ar gas at 760torr was about 4000-5000K.(3) Using these ultra-small plasma beam, we succeeded various micro-processing as follows : (A) melting of metal (Fe, Al, Cu). (B) oxidization. (C) deposition (C-system).Especially, due to the advance of matching performance, far from the plasma generating electric source, we could generate such small plasma and performe surface-treatment as mentioned above.