Development of integrated optical measurement systems having layered structures

为了实现体积小、性能好的实用化，研制了一些集成光学测量系统。激光干涉仪：通过引入厚度接近光波长的光电二极管，实现了指尖体积（φ <$2.5cm）的驻波探测型干涉仪。通过在激光二极管的校准透镜的外壳上堆叠偏振器、四分之一2板和薄膜光电二极管来实现光学设置。干涉仪信号幅度为1 μ A，检测速度为9 cm/s的运动。这接近实际规格。还测量了散斑图中的驻波，实现了对具有粗糙表面的样品的测量。现在结合法布里-珀罗谐振腔来提高信号强度和净化干涉信号。光学编码器：光栅可以结合在硅微结构上，实现新型编码器。成像型编码器的问题在于，随着光栅数量的增加，光学设置变得复杂。由于光栅可以在对准位置处集成，因此减小了对准问题，实现了在用于高图像对比度的位置处的自动设置。此外，检测光栅的调制节距可以消除高阶噪声。并结合LED芯片和IC芯片对整个编码器系统进行了演示。目前，激光器的出射场空间较窄，光学平均效应有限。照明光学系统正在修改中。按计划，通过堆叠平面元件来演示光学系统的基本性能。传感器被证实是有效的实现集成传感器系统。

Some integrated optical measurement systems are developed for realizing the small size but having practical performance. The research is both the development of elements and the packaging of optical setup.Laser interferometer: By introducing the photodiode with the thickness near to the optical wavelength, the standing wave detection-type interferometer is realized at the volume of fingertip (φ 〜 2.5cm). The optical setup is realized by stacking a polarizer, a quarter 2 plate, and the thin film photodiode on the housing of the collation lens of the laser diode. The interferometer signal magnitude is 1 μ A detecting the movement at the speed of 9cm/s. This is near to the practical specification. The standing wave in the speckle pattern is also measured realizing the measurement of the sample having rough surface. Now. Fabry-perot resonant cavity is combined for increasing the signal intensity and for purifying the interference signal. The effect is clearly observed, and tuning to the accurate resonant condition is aimed.Optical encoder: The grating can be combined on the Si microstructure realizing new types of encoder. The imaging type encoder has the problem that the optical setup becomes complicated with the increasing number of grating. Since the grating can be integrated at the aligned position, the alignment problem is reduced realizing the automatic setting at the position serving the high image contrast. Additionally, the modulated pitch of the detection grating can cancel the higher order noise. The total encoder system is demonstrated combining with the LED chip and the IC chip. At present, the emitting field is spatially narrow and optical averaging effect is limited. The illumination optics is under the revision.As scheduled, optical systems are demonstrated clearing the fundamental performance by stacking planer elements. Sensors are confirmed to be effective for realizing the integrated sensor systems.